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- W2471069122 abstract "Some attempts have been reported to increase the repetition rate of excimer lasers, say, a 2-kHz XeF laser using a fast gas blow down system1 and a 1-kHz KrF laser at an output of 200 W in a few minutes,2 Recently, Sentis et al. demonstrated a 1-kHz XeCl laser at an output of 200 W and up to 1.7 kHz in a burst mode operation of 200 shots, using a wire ion plasma x-ray gun for preionization Meanwhile, we have published the 2.5-kHz XeCl laser with 87-W output power, circulating gas by a high head axial blower.4" @default.
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- W2471069122 date "1992-05-10" @default.
- W2471069122 modified "2023-09-23" @default.
- W2471069122 title "Ultrahigh repetition rate and high-power XeCl excimer laser" @default.
- W2471069122 hasPublicationYear "1992" @default.
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