Matches in SemOpenAlex for { <https://semopenalex.org/work/W2471069879> ?p ?o ?g. }
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- W2471069879 endingPage "216" @default.
- W2471069879 startingPage "212" @default.
- W2471069879 abstract "Abstract Photo sensitive polymer SU-8, owing to its excellent mechanical properties and dielectric properties on polymerization, is widely used in MEMS device fabrications. However, the removing, stripping or re-patterning of the cross-linked SU-8 is a difficult issue. In this paper, CF 4 /O 2 gas mixture provided by a plasma asher equipment was used for the patterning of cross-linked SU-8 material. The RF power, the temperature of the substrate holder, chamber pressure and gas concentration were optimized for the cross-linked SU-8 etching process. When the CF 4 /O 2 mixture contains about 5%CF 4 by volume, the etching rate can be reached at 5.2 μm/min." @default.
- W2471069879 created "2016-07-22" @default.
- W2471069879 creator A5014456836 @default.
- W2471069879 creator A5022537404 @default.
- W2471069879 creator A5075373892 @default.
- W2471069879 creator A5086082677 @default.
- W2471069879 creator A5089328262 @default.
- W2471069879 date "2016-05-01" @default.
- W2471069879 modified "2023-09-24" @default.
- W2471069879 title "A New Dry Etching Method with the High Etching Rate for Patterning Cross–Linked SU–8 Thick Films" @default.
- W2471069879 cites W1984263916 @default.
- W2471069879 cites W2000372492 @default.
- W2471069879 cites W2027785931 @default.
- W2471069879 cites W2028567428 @default.
- W2471069879 cites W2093764712 @default.
- W2471069879 cites W2123420127 @default.
- W2471069879 cites W2131774812 @default.
- W2471069879 cites W2142303686 @default.
- W2471069879 cites W2171457885 @default.
- W2471069879 cites W1922720400 @default.
- W2471069879 doi "https://doi.org/10.1515/jee-2016-0030" @default.
- W2471069879 hasPublicationYear "2016" @default.
- W2471069879 type Work @default.
- W2471069879 sameAs 2471069879 @default.
- W2471069879 citedByCount "3" @default.
- W2471069879 countsByYear W24710698792020 @default.
- W2471069879 countsByYear W24710698792021 @default.
- W2471069879 countsByYear W24710698792022 @default.
- W2471069879 crossrefType "journal-article" @default.
- W2471069879 hasAuthorship W2471069879A5014456836 @default.
- W2471069879 hasAuthorship W2471069879A5022537404 @default.
- W2471069879 hasAuthorship W2471069879A5075373892 @default.
- W2471069879 hasAuthorship W2471069879A5086082677 @default.
- W2471069879 hasAuthorship W2471069879A5089328262 @default.
- W2471069879 hasBestOaLocation W24710698791 @default.
- W2471069879 hasConcept C100460472 @default.
- W2471069879 hasConcept C1291036 @default.
- W2471069879 hasConcept C130472188 @default.
- W2471069879 hasConcept C171250308 @default.
- W2471069879 hasConcept C192562407 @default.
- W2471069879 hasConcept C2779227376 @default.
- W2471069879 hasConcept C49040817 @default.
- W2471069879 hasConceptScore W2471069879C100460472 @default.
- W2471069879 hasConceptScore W2471069879C1291036 @default.
- W2471069879 hasConceptScore W2471069879C130472188 @default.
- W2471069879 hasConceptScore W2471069879C171250308 @default.
- W2471069879 hasConceptScore W2471069879C192562407 @default.
- W2471069879 hasConceptScore W2471069879C2779227376 @default.
- W2471069879 hasConceptScore W2471069879C49040817 @default.
- W2471069879 hasIssue "3" @default.
- W2471069879 hasLocation W24710698791 @default.
- W2471069879 hasOpenAccess W2471069879 @default.
- W2471069879 hasPrimaryLocation W24710698791 @default.
- W2471069879 hasRelatedWork W1027804280 @default.
- W2471069879 hasRelatedWork W1997614918 @default.
- W2471069879 hasRelatedWork W2362168926 @default.
- W2471069879 hasRelatedWork W2476513235 @default.
- W2471069879 hasRelatedWork W2508781151 @default.
- W2471069879 hasRelatedWork W2570356955 @default.
- W2471069879 hasRelatedWork W276919344 @default.
- W2471069879 hasRelatedWork W2886779990 @default.
- W2471069879 hasRelatedWork W3021027562 @default.
- W2471069879 hasRelatedWork W2253695700 @default.
- W2471069879 hasRelatedWork W2255775982 @default.
- W2471069879 hasRelatedWork W2759810177 @default.
- W2471069879 hasRelatedWork W2770561590 @default.
- W2471069879 hasRelatedWork W2812102546 @default.
- W2471069879 hasRelatedWork W2858526162 @default.
- W2471069879 hasRelatedWork W2869596566 @default.
- W2471069879 hasRelatedWork W2872745792 @default.
- W2471069879 hasRelatedWork W2886432981 @default.
- W2471069879 hasRelatedWork W2937759689 @default.
- W2471069879 hasRelatedWork W3140839585 @default.
- W2471069879 hasVolume "67" @default.
- W2471069879 isParatext "false" @default.
- W2471069879 isRetracted "false" @default.
- W2471069879 magId "2471069879" @default.
- W2471069879 workType "article" @default.