Matches in SemOpenAlex for { <https://semopenalex.org/work/W2474096282> ?p ?o ?g. }
- W2474096282 endingPage "086502" @default.
- W2474096282 startingPage "086502" @default.
- W2474096282 abstract "Abstract We evaluated the silicon nitride (SiN) etching characteristics of Ar/O 2 /hydrofluorocarbon plasma. Ar/CH 3 F/O 2 plasma achieved a high etching selectivity of SiN to SiO 2 by increasing the oxygen flow rate. We also evaluated the dependence of SiN etching characteristics on SiN film density. A low-density film deposited at a low temperature of 200 °C (by plasma-enhanced CVD, PECVD) showed an 8–20% lower etching rate of SiN than a high-density film deposited at a high temperature of 780 °C (by low-pressure CVD, LPCVD) when we had a low RF bias of 30 W. This PECVD film might move the competitive balance to oxidation from fluorination, reducing the SiN etching rate. However, when we have a high RF bias of more than 50 W, the SiN etching rate is 2–15% higher in the PECVD film than in the LPCVD film. The etching rate of SiN at various densities depends on the balance between oxidation and ion bombardment." @default.
- W2474096282 created "2016-07-22" @default.
- W2474096282 creator A5029777672 @default.
- W2474096282 creator A5032172498 @default.
- W2474096282 creator A5063845274 @default.
- W2474096282 date "2016-07-05" @default.
- W2474096282 modified "2023-09-25" @default.
- W2474096282 title "SiN etching characteristics of Ar/CH<sub>3</sub>F/O<sub>2</sub>plasma and dependence on SiN film density" @default.
- W2474096282 cites W13173232 @default.
- W2474096282 cites W1528413916 @default.
- W2474096282 cites W1538606258 @default.
- W2474096282 cites W1582746313 @default.
- W2474096282 cites W1618911772 @default.
- W2474096282 cites W1630070453 @default.
- W2474096282 cites W1630756323 @default.
- W2474096282 cites W1653809286 @default.
- W2474096282 cites W1851654953 @default.
- W2474096282 cites W1950149442 @default.
- W2474096282 cites W1970743879 @default.
- W2474096282 cites W1972655781 @default.
- W2474096282 cites W1975271377 @default.
- W2474096282 cites W1977277085 @default.
- W2474096282 cites W1987477222 @default.
- W2474096282 cites W1989464087 @default.
- W2474096282 cites W1989518193 @default.
- W2474096282 cites W1996517840 @default.
- W2474096282 cites W2003452706 @default.
- W2474096282 cites W2004545110 @default.
- W2474096282 cites W2004629985 @default.
- W2474096282 cites W2009067941 @default.
- W2474096282 cites W2011453476 @default.
- W2474096282 cites W2014631031 @default.
- W2474096282 cites W2021785574 @default.
- W2474096282 cites W2043348773 @default.
- W2474096282 cites W2045216665 @default.
- W2474096282 cites W2046836154 @default.
- W2474096282 cites W2049746299 @default.
- W2474096282 cites W2054064874 @default.
- W2474096282 cites W2054118508 @default.
- W2474096282 cites W2055955806 @default.
- W2474096282 cites W2060667052 @default.
- W2474096282 cites W2062905467 @default.
- W2474096282 cites W2067848314 @default.
- W2474096282 cites W2070094478 @default.
- W2474096282 cites W2071272933 @default.
- W2474096282 cites W2072035092 @default.
- W2474096282 cites W2072610183 @default.
- W2474096282 cites W2074264028 @default.
- W2474096282 cites W2076021832 @default.
- W2474096282 cites W2083138049 @default.
- W2474096282 cites W2087223408 @default.
- W2474096282 cites W2087784862 @default.
- W2474096282 cites W2092160446 @default.
- W2474096282 cites W2094202952 @default.
- W2474096282 cites W2110545200 @default.
- W2474096282 cites W2131006132 @default.
- W2474096282 cites W2160251376 @default.
- W2474096282 cites W2166837734 @default.
- W2474096282 cites W2172065341 @default.
- W2474096282 cites W2466623488 @default.
- W2474096282 cites W4241572242 @default.
- W2474096282 doi "https://doi.org/10.7567/jjap.55.086502" @default.
- W2474096282 hasPublicationYear "2016" @default.
- W2474096282 type Work @default.
- W2474096282 sameAs 2474096282 @default.
- W2474096282 citedByCount "18" @default.
- W2474096282 countsByYear W24740962822017 @default.
- W2474096282 countsByYear W24740962822018 @default.
- W2474096282 countsByYear W24740962822019 @default.
- W2474096282 countsByYear W24740962822020 @default.
- W2474096282 countsByYear W24740962822021 @default.
- W2474096282 countsByYear W24740962822022 @default.
- W2474096282 countsByYear W24740962822023 @default.
- W2474096282 crossrefType "journal-article" @default.
- W2474096282 hasAuthorship W2474096282A5029777672 @default.
- W2474096282 hasAuthorship W2474096282A5032172498 @default.
- W2474096282 hasAuthorship W2474096282A5063845274 @default.
- W2474096282 hasConcept C100460472 @default.
- W2474096282 hasConcept C107187091 @default.
- W2474096282 hasConcept C113196181 @default.
- W2474096282 hasConcept C121332964 @default.
- W2474096282 hasConcept C130472188 @default.
- W2474096282 hasConcept C171250308 @default.
- W2474096282 hasConcept C172120300 @default.
- W2474096282 hasConcept C178790620 @default.
- W2474096282 hasConcept C185592680 @default.
- W2474096282 hasConcept C192562407 @default.
- W2474096282 hasConcept C2777431650 @default.
- W2474096282 hasConcept C2779227376 @default.
- W2474096282 hasConcept C38347018 @default.
- W2474096282 hasConcept C43617362 @default.
- W2474096282 hasConcept C49040817 @default.
- W2474096282 hasConcept C540031477 @default.
- W2474096282 hasConcept C544956773 @default.
- W2474096282 hasConcept C57410435 @default.
- W2474096282 hasConcept C62520636 @default.
- W2474096282 hasConcept C82706917 @default.
- W2474096282 hasConceptScore W2474096282C100460472 @default.