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• W2474334880 abstract "Abstract It is very difficult to realize sub-3 nm patterns using conventional lithography for next-generation high-performance nanosensing, photonic and computing devices. Here we propose a completely original and novel concept, termed self-shrinking dielectric mask (SDM), to fabricate sub-3 nm patterns. Instead of focusing the electron and ion beams or light to an extreme scale, the SDM method relies on a hard dielectric mask which shrinks the critical dimension of nanopatterns during the ion irradiation. Based on the SDM method, a linewidth as low as 2.1 nm was achieved along with a high aspect ratio in the sub-10 nm scale. In addition, numerous patterns with assorted shapes can be fabricated simultaneously using the SDM technique, exhibiting a much higher throughput than conventional ion beam lithography. Therefore, the SDM method can be widely applied in the fields which need extreme nanoscale fabrication." @default.
• W2474334880 created "2016-07-22" @default.
• W2474334880 creator A5000742422 @default.
• W2474334880 creator A5019642272 @default.
• W2474334880 creator A5044693849 @default.
• W2474334880 creator A5058829576 @default.
• W2474334880 date "2016-07-12" @default.
• W2474334880 modified "2023-09-24" @default.
• W2474334880 title "Novel Self-shrinking Mask for Sub-3 nm Pattern Fabrication" @default.
• W2474334880 cites W1966651444 @default.
• W2474334880 cites W1971232887 @default.
• W2474334880 cites W1974207245 @default.
• W2474334880 cites W1977282891 @default.
• W2474334880 cites W1980284953 @default.
• W2474334880 cites W1984370509 @default.
• W2474334880 cites W1987934864 @default.
• W2474334880 cites W1998892730 @default.
• W2474334880 cites W1999788974 @default.
• W2474334880 cites W2005485153 @default.
• W2474334880 cites W2020859444 @default.
• W2474334880 cites W2024502892 @default.
• W2474334880 cites W2024983953 @default.
• W2474334880 cites W2025786823 @default.
• W2474334880 cites W2026652927 @default.
• W2474334880 cites W2037537680 @default.
• W2474334880 cites W2039370162 @default.
• W2474334880 cites W2044615652 @default.
• W2474334880 cites W2045416062 @default.
• W2474334880 cites W2046986693 @default.
• W2474334880 cites W2050618589 @default.
• W2474334880 cites W2059899980 @default.
• W2474334880 cites W2079418923 @default.
• W2474334880 cites W2080668629 @default.
• W2474334880 cites W2084077456 @default.
• W2474334880 cites W2087741292 @default.
• W2474334880 cites W2088879277 @default.
• W2474334880 cites W2094656325 @default.
• W2474334880 cites W2129705664 @default.
• W2474334880 cites W2130353331 @default.
• W2474334880 cites W2130402176 @default.
• W2474334880 cites W2132985166 @default.
• W2474334880 cites W2153896731 @default.
• W2474334880 cites W2322522055 @default.
• W2474334880 cites W2435480937 @default.
• W2474334880 cites W2481407830 @default.
• W2474334880 cites W2913099531 @default.
• W2474334880 cites W2975639389 @default.
• W2474334880 cites W4249963095 @default.
• W2474334880 doi "https://doi.org/10.1038/srep29625" @default.
• W2474334880 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/4940743" @default.
• W2474334880 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/27404325" @default.
• W2474334880 hasPublicationYear "2016" @default.
• W2474334880 type Work @default.
• W2474334880 sameAs 2474334880 @default.
• W2474334880 citedByCount "6" @default.
• W2474334880 countsByYear W24743348802017 @default.
• W2474334880 countsByYear W24743348802019 @default.
• W2474334880 countsByYear W24743348802021 @default.
• W2474334880 countsByYear W24743348802022 @default.
• W2474334880 crossrefType "journal-article" @default.
• W2474334880 hasAuthorship W2474334880A5000742422 @default.
• W2474334880 hasAuthorship W2474334880A5019642272 @default.
• W2474334880 hasAuthorship W2474334880A5044693849 @default.
• W2474334880 hasAuthorship W2474334880A5058829576 @default.
• W2474334880 hasBestOaLocation W24743348801 @default.
• W2474334880 hasConcept C105487726 @default.
• W2474334880 hasConcept C120665830 @default.
• W2474334880 hasConcept C121332964 @default.
• W2474334880 hasConcept C133386390 @default.
• W2474334880 hasConcept C136525101 @default.
• W2474334880 hasConcept C142181693 @default.
• W2474334880 hasConcept C142724271 @default.
• W2474334880 hasConcept C157764524 @default.
• W2474334880 hasConcept C162117346 @default.
• W2474334880 hasConcept C163581340 @default.
• W2474334880 hasConcept C171250308 @default.
• W2474334880 hasConcept C177409738 @default.
• W2474334880 hasConcept C192562407 @default.
• W2474334880 hasConcept C200274948 @default.
• W2474334880 hasConcept C204223013 @default.
• W2474334880 hasConcept C204787440 @default.
• W2474334880 hasConcept C207789793 @default.
• W2474334880 hasConcept C2779227376 @default.
• W2474334880 hasConcept C2781048479 @default.
• W2474334880 hasConcept C41008148 @default.
• W2474334880 hasConcept C45206210 @default.
• W2474334880 hasConcept C49040817 @default.
• W2474334880 hasConcept C520434653 @default.
• W2474334880 hasConcept C53524968 @default.
• W2474334880 hasConcept C555944384 @default.
• W2474334880 hasConcept C71924100 @default.
• W2474334880 hasConcept C76155785 @default.
• W2474334880 hasConcept C82558694 @default.
• W2474334880 hasConceptScore W2474334880C105487726 @default.
• W2474334880 hasConceptScore W2474334880C120665830 @default.
• W2474334880 hasConceptScore W2474334880C121332964 @default.
• W2474334880 hasConceptScore W2474334880C133386390 @default.
• W2474334880 hasConceptScore W2474334880C136525101 @default.
• W2474334880 hasConceptScore W2474334880C142181693 @default.
• W2474334880 hasConceptScore W2474334880C142724271 @default.

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