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- W2474988382 abstract "The Post Metallization Anneal (PMA) was investigated for Al gate lanthana (La 2 O 3 ) nMISFETs with equivalent oxide thickness (EOT) ranging from 1.88 nm to 2.17 nm. Conventional Post Deposition Anneal (PDA) in N 2 ambient leads to negative threshold voltage (V th ) shift. Thus, this gave rise to normally-ON characteristic [1]. However, by using PMA in N 2 ambient, we have found that normally-ON characteristic can be completely suppressed. Threshold voltages ranging from 0.13 V to 0.23 V were extracted from the extrapolation of I d -V g plots. Extracted subthreshold slopes were 82.7 mV/decade, 83.3 mV/decade, and 90.8 mV/decade, respectively, suggesting a fairly good interfacial quality." @default.
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- W2474988382 date "2004-01-01" @default.
- W2474988382 modified "2023-09-28" @default.
- W2474988382 title "A study of aluminum gate La2O3 nMISFET with post metallization anneal" @default.
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