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- W2476515540 abstract "An AlN electro-optic phase shifter with a parallel plate capacitor structure is fabricated on Si using the back-end complementary metal-oxide-semiconductor technology, which is feasible for multilayer photonics integration. The modulation efficiency (Vπ⋅Lπ product) measured from the fabricated waveguide-ring resonators and Mach-Zehnder Interferometer (MZI) modulators near the 1550-nm wavelength is ∼240 V⋅cm for the transverse electric (TE) mode and ∼320 V⋅cm for the transverse magnetic (TM) mode, from which the Pockels coefficient of the deposited AlN is deduced to be ∼1.0 pm/V for both TE and TM modes. The methods for further modulation efficiency improvement are addressed." @default.
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- W2476515540 date "2016-05-31" @default.
- W2476515540 modified "2023-10-02" @default.
- W2476515540 title "Aluminum nitride electro-optic phase shifter for backend integration on silicon" @default.
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- W2476515540 doi "https://doi.org/10.1364/oe.24.012501" @default.
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