FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2476751301> ?p ?o ?g. }

• W2476751301 endingPage "42" @default.
• W2476751301 startingPage "38" @default.
• W2476751301 abstract "This work presents a study on the effects of hydrogen dilution and boron doping on the formation of Si–C and Si–H bonds during the deposition of hydrogenated amorphous silicon carbon alloy films by plasma-enhanced chemical vapor deposition. Low power densities of 25 mW/cm2 and 50 mW/cm2, high pressure of 1.5 Torr, temperatures of 150 °C and 200 °C, and methane-silane gas flow ratios of 0.70 and 0.85 were chosen in order to obtain suitable films for biomedical and biological applications. FTIR spectroscopy, UV-Vis spectroscopy, atomic force microscopy and electrical dark conductivity measurements were carried out to characterize the films. The results show that hydrogen dilution decreases CHn groups in the films and increases the Si–C and Si–H bond densities, whereas B-doping decreases the Si–C and Si–H bond densities. Undoped films with optical band gap of 2.47 eV and conductivity around of 5x10-10 S/cm, and B-doped films with a root mean square roughness of about 1 nm and a conductivity of the order of 10-6 S/cm were obtained." @default.
• W2476751301 created "2016-08-23" @default.
• W2476751301 creator A5031090013 @default.
• W2476751301 creator A5050780318 @default.
• W2476751301 creator A5051374677 @default.
• W2476751301 creator A5089022576 @default.
• W2476751301 date "2016-04-19" @default.
• W2476751301 modified "2023-10-13" @default.
• W2476751301 title "Effects of hydrogen dilution and B-doping on the density of Si–C bonds and properties of a-SixC1-x:H films" @default.
• W2476751301 cites W1503186585 @default.
• W2476751301 cites W1643884677 @default.
• W2476751301 cites W1964203277 @default.
• W2476751301 cites W1984210349 @default.
• W2476751301 cites W1988153721 @default.
• W2476751301 cites W2011433367 @default.
• W2476751301 cites W2012772051 @default.
• W2476751301 cites W2031458924 @default.
• W2476751301 cites W2040875144 @default.
• W2476751301 cites W2053220049 @default.
• W2476751301 cites W2058856912 @default.
• W2476751301 cites W2071386522 @default.
• W2476751301 cites W2091676744 @default.
• W2476751301 cites W2112181062 @default.
• W2476751301 cites W639767525 @default.
• W2476751301 hasPublicationYear "2016" @default.
• W2476751301 type Work @default.
• W2476751301 sameAs 2476751301 @default.
• W2476751301 citedByCount "0" @default.
• W2476751301 crossrefType "journal-article" @default.
• W2476751301 hasAuthorship W2476751301A5031090013 @default.
• W2476751301 hasAuthorship W2476751301A5050780318 @default.
• W2476751301 hasAuthorship W2476751301A5051374677 @default.
• W2476751301 hasAuthorship W2476751301A5089022576 @default.
• W2476751301 hasConcept C113196181 @default.
• W2476751301 hasConcept C119599485 @default.
• W2476751301 hasConcept C127413603 @default.
• W2476751301 hasConcept C131540310 @default.
• W2476751301 hasConcept C147789679 @default.
• W2476751301 hasConcept C159985019 @default.
• W2476751301 hasConcept C160892712 @default.
• W2476751301 hasConcept C171250308 @default.
• W2476751301 hasConcept C178790620 @default.
• W2476751301 hasConcept C185592680 @default.
• W2476751301 hasConcept C191897082 @default.
• W2476751301 hasConcept C192562407 @default.
• W2476751301 hasConcept C2778024649 @default.
• W2476751301 hasConcept C38347018 @default.
• W2476751301 hasConcept C42360764 @default.
• W2476751301 hasConcept C49040817 @default.
• W2476751301 hasConcept C512968161 @default.
• W2476751301 hasConcept C544956773 @default.
• W2476751301 hasConcept C56052488 @default.
• W2476751301 hasConcept C57410435 @default.
• W2476751301 hasConcept C57863236 @default.
• W2476751301 hasConcept C69990965 @default.
• W2476751301 hasConcept C8010536 @default.
• W2476751301 hasConceptScore W2476751301C113196181 @default.
• W2476751301 hasConceptScore W2476751301C119599485 @default.
• W2476751301 hasConceptScore W2476751301C127413603 @default.
• W2476751301 hasConceptScore W2476751301C131540310 @default.
• W2476751301 hasConceptScore W2476751301C147789679 @default.
• W2476751301 hasConceptScore W2476751301C159985019 @default.
• W2476751301 hasConceptScore W2476751301C160892712 @default.
• W2476751301 hasConceptScore W2476751301C171250308 @default.
• W2476751301 hasConceptScore W2476751301C178790620 @default.
• W2476751301 hasConceptScore W2476751301C185592680 @default.
• W2476751301 hasConceptScore W2476751301C191897082 @default.
• W2476751301 hasConceptScore W2476751301C192562407 @default.
• W2476751301 hasConceptScore W2476751301C2778024649 @default.
• W2476751301 hasConceptScore W2476751301C38347018 @default.
• W2476751301 hasConceptScore W2476751301C42360764 @default.
• W2476751301 hasConceptScore W2476751301C49040817 @default.
• W2476751301 hasConceptScore W2476751301C512968161 @default.
• W2476751301 hasConceptScore W2476751301C544956773 @default.
• W2476751301 hasConceptScore W2476751301C56052488 @default.
• W2476751301 hasConceptScore W2476751301C57410435 @default.
• W2476751301 hasConceptScore W2476751301C57863236 @default.
• W2476751301 hasConceptScore W2476751301C69990965 @default.
• W2476751301 hasConceptScore W2476751301C8010536 @default.
• W2476751301 hasIssue "2" @default.
• W2476751301 hasLocation W24767513011 @default.
• W2476751301 hasOpenAccess W2476751301 @default.
• W2476751301 hasPrimaryLocation W24767513011 @default.
• W2476751301 hasRelatedWork W1964203277 @default.
• W2476751301 hasRelatedWork W1981790345 @default.
• W2476751301 hasRelatedWork W1985756877 @default.
• W2476751301 hasRelatedWork W2025381161 @default.
• W2476751301 hasRelatedWork W2038300207 @default.
• W2476751301 hasRelatedWork W2044446705 @default.
• W2476751301 hasRelatedWork W2058985493 @default.
• W2476751301 hasRelatedWork W2067742427 @default.
• W2476751301 hasRelatedWork W2080447348 @default.
• W2476751301 hasRelatedWork W2121544398 @default.
• W2476751301 hasRelatedWork W2323985989 @default.
• W2476751301 hasRelatedWork W2324720451 @default.
• W2476751301 hasRelatedWork W2335445277 @default.
• W2476751301 hasRelatedWork W2342984182 @default.
• W2476751301 hasRelatedWork W2373668720 @default.

• next