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- W2477574906 abstract "This chapter presents the relationships among system pressure, pumping speed, and outgassing. The material of the chamber wall is usually stainless steel or aluminum, but may be mild steel or copper, and for these metals, the value of outgassing rate depends primarily on the thickness and condition of the thin oxide film that always exists on the surface and on the partial pressure of water vapor in the air to which the surface is exposed for a given time prior to pump down. The chapter also presents the relationships among system pressure, pumping speed, outgassing rates, and chamber dimensions. During the initial pumpdown from atmosphere of the empty chamber with a mechanical pump of net speed, the outgassing and sorption terms can be neglected until the pressure produced by the roughing pump alone falls below a value." @default.
- W2477574906 created "2016-08-23" @default.
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- W2477574906 date "1998-01-01" @default.
- W2477574906 modified "2023-09-26" @default.
- W2477574906 title "Outgassing of Materials" @default.
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- W2477574906 doi "https://doi.org/10.1016/b978-012352065-4/50068-7" @default.
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