Matches in SemOpenAlex for { <https://semopenalex.org/work/W2477887716> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W2477887716 abstract "The metrology-data-quality-index (DQIy) algorithm was proposed to perform metrology-data-quality evaluation of the automatic-virtual-metrology (AVM) system developed by the authors. The DQIy algorithm is based on the adaptive-resonance-theory 2 (ART2). ART2 divides data into different patterns according to the similarity of process data, and then calculates the corresponding DQIy value and its threshold, DQIyT, for evaluation and judgment. However, in practical applications, the classical ART2 technique still could not cluster process data very precisely. Since some samples with dissimilar process parameters might be sorted into the same cluster, two or more groups could be found in the corresponding metrology-data cluster. This phenomenon may cause invalid DQIy detection. To solve the problem above, the advanced ART2 scheme is proposed in this paper to enhance the accuracy of the DQIy algorithm. A large industrial data set showing both a shift in metrology measurements without a process shift and a process shift that was not captured by the metrology of the actual photo and color-filter production tools of a TFT-LCD factory were adopted as illustrative examples to verify the practicality of the proposed scheme. Experimental results show that the performance of the advanced ART2 is indeed better than that of the original ART2." @default.
- W2477887716 created "2016-08-23" @default.
- W2477887716 creator A5006603073 @default.
- W2477887716 date "2013-01-01" @default.
- W2477887716 modified "2023-09-26" @default.
- W2477887716 title "Advanced ART2 scheme for enhancing metrology-data-quality evaluation" @default.
- W2477887716 hasPublicationYear "2013" @default.
- W2477887716 type Work @default.
- W2477887716 sameAs 2477887716 @default.
- W2477887716 citedByCount "0" @default.
- W2477887716 crossrefType "journal-article" @default.
- W2477887716 hasAuthorship W2477887716A5006603073 @default.
- W2477887716 hasConcept C105795698 @default.
- W2477887716 hasConcept C106131492 @default.
- W2477887716 hasConcept C111919701 @default.
- W2477887716 hasConcept C113775141 @default.
- W2477887716 hasConcept C11413529 @default.
- W2477887716 hasConcept C115755159 @default.
- W2477887716 hasConcept C124101348 @default.
- W2477887716 hasConcept C127413603 @default.
- W2477887716 hasConcept C154945302 @default.
- W2477887716 hasConcept C195766429 @default.
- W2477887716 hasConcept C199360897 @default.
- W2477887716 hasConcept C24326235 @default.
- W2477887716 hasConcept C31972630 @default.
- W2477887716 hasConcept C33923547 @default.
- W2477887716 hasConcept C40149104 @default.
- W2477887716 hasConcept C41008148 @default.
- W2477887716 hasConcept C50644808 @default.
- W2477887716 hasConcept C98045186 @default.
- W2477887716 hasConceptScore W2477887716C105795698 @default.
- W2477887716 hasConceptScore W2477887716C106131492 @default.
- W2477887716 hasConceptScore W2477887716C111919701 @default.
- W2477887716 hasConceptScore W2477887716C113775141 @default.
- W2477887716 hasConceptScore W2477887716C11413529 @default.
- W2477887716 hasConceptScore W2477887716C115755159 @default.
- W2477887716 hasConceptScore W2477887716C124101348 @default.
- W2477887716 hasConceptScore W2477887716C127413603 @default.
- W2477887716 hasConceptScore W2477887716C154945302 @default.
- W2477887716 hasConceptScore W2477887716C195766429 @default.
- W2477887716 hasConceptScore W2477887716C199360897 @default.
- W2477887716 hasConceptScore W2477887716C24326235 @default.
- W2477887716 hasConceptScore W2477887716C31972630 @default.
- W2477887716 hasConceptScore W2477887716C33923547 @default.
- W2477887716 hasConceptScore W2477887716C40149104 @default.
- W2477887716 hasConceptScore W2477887716C41008148 @default.
- W2477887716 hasConceptScore W2477887716C50644808 @default.
- W2477887716 hasConceptScore W2477887716C98045186 @default.
- W2477887716 hasLocation W24778877161 @default.
- W2477887716 hasOpenAccess W2477887716 @default.
- W2477887716 hasPrimaryLocation W24778877161 @default.
- W2477887716 hasRelatedWork W1981046661 @default.
- W2477887716 hasRelatedWork W2007645905 @default.
- W2477887716 hasRelatedWork W2017920674 @default.
- W2477887716 hasRelatedWork W2043446112 @default.
- W2477887716 hasRelatedWork W2046790483 @default.
- W2477887716 hasRelatedWork W2054101274 @default.
- W2477887716 hasRelatedWork W2065824217 @default.
- W2477887716 hasRelatedWork W2072551536 @default.
- W2477887716 hasRelatedWork W2093259049 @default.
- W2477887716 hasRelatedWork W2104814113 @default.
- W2477887716 hasRelatedWork W2285112630 @default.
- W2477887716 hasRelatedWork W2350200885 @default.
- W2477887716 hasRelatedWork W2493672704 @default.
- W2477887716 hasRelatedWork W2615859282 @default.
- W2477887716 hasRelatedWork W2896655203 @default.
- W2477887716 hasRelatedWork W2919568442 @default.
- W2477887716 hasRelatedWork W2922742974 @default.
- W2477887716 hasRelatedWork W191718344 @default.
- W2477887716 hasRelatedWork W2830613426 @default.
- W2477887716 hasRelatedWork W3075704704 @default.
- W2477887716 isParatext "false" @default.
- W2477887716 isRetracted "false" @default.
- W2477887716 magId "2477887716" @default.
- W2477887716 workType "article" @default.