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- W2479199510 abstract "A new dry plasma ENVIRO™ process methodology has been developed for solubilizing photoresist-ashing residues after plasma etching or ion implantation. RIE and microwave downstream plasma treatment with NF3, 02 and other gases are employed. 100% solubilization in dI water has been attained with no use of solvent or acids." @default.
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- W2479199510 date "2000-11-09" @default.
- W2479199510 modified "2023-09-25" @default.
- W2479199510 title "Eliminating Solvents and Acids in Wafer Processing" @default.
- W2479199510 doi "https://doi.org/10.1021/bk-2001-0766.ch004" @default.
- W2479199510 hasPublicationYear "2000" @default.
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