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- W2479331313 abstract "In recent years, the modulated photoreflectance (MPR) technique[1] has attracted great attention because of the advantages of nondestructive, noncontact and high spacial resolution. It has been successfully used as a powerful method for monitoring the dose of ion implantation [2] and imaging the subsurface features of integrated circuits [3,4]." @default.
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- W2479331313 date "1992-01-01" @default.
- W2479331313 modified "2023-09-25" @default.
- W2479331313 title "Nonlinear Response of Modulated Photoreflectance in Silicon" @default.
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