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• W248282800 abstract "(100) Si wafers implanted with 2×10 15 31 P + /cm 2 at 10 keV have been annealed by different techniques i.e. Q-switched ruby laser, pulsed electron beam, multiscan electron beam and furnace at 900°C 1/2 h. Analysis of residual damage (by Rutherford back-scattering and transmission electron microscopy), bulk life time, mobilities in the implanted layer and carrier concentration profiles have been obtained and compared for the different techniques investigated. Collected data supply information on the nature (liquid or solid phase) of the epitaxial regrowth of the implanted layer. Computer simulation of the heating effects produced by an electron beam at 20 keV have been used to define the experimental parameters for annealing." @default.
• W248282800 created "2016-06-24" @default.
• W248282800 creator A5012431093 @default.
• W248282800 creator A5023789656 @default.
• W248282800 creator A5029925380 @default.
• W248282800 creator A5042639769 @default.
• W248282800 creator A5060268877 @default.
• W248282800 creator A5070354621 @default.
• W248282800 date "1980-01-01" @default.
• W248282800 modified "2023-09-22" @default.
• W248282800 title "CHARACTERIZATION OF IMPLANTED LAYERS AFTER LASER AND ELECTRON BEAM ANNEALING" @default.
• W248282800 cites W2000376439 @default.
• W248282800 cites W2055985445 @default.
• W248282800 doi "https://doi.org/10.1016/b978-0-12-746850-1.50042-6" @default.
• W248282800 hasPublicationYear "1980" @default.
• W248282800 type Work @default.
• W248282800 sameAs 248282800 @default.
• W248282800 citedByCount "2" @default.
• W248282800 crossrefType "book-chapter" @default.
• W248282800 hasAuthorship W248282800A5012431093 @default.
• W248282800 hasAuthorship W248282800A5023789656 @default.
• W248282800 hasAuthorship W248282800A5029925380 @default.
• W248282800 hasAuthorship W248282800A5042639769 @default.
• W248282800 hasAuthorship W248282800A5060268877 @default.
• W248282800 hasAuthorship W248282800A5070354621 @default.
• W248282800 hasConcept C110738630 @default.
• W248282800 hasConcept C113196181 @default.
• W248282800 hasConcept C120665830 @default.
• W248282800 hasConcept C121332964 @default.
• W248282800 hasConcept C142199849 @default.
• W248282800 hasConcept C145148216 @default.
• W248282800 hasConcept C146088050 @default.
• W248282800 hasConcept C147120987 @default.
• W248282800 hasConcept C160671074 @default.
• W248282800 hasConcept C171250308 @default.
• W248282800 hasConcept C178790620 @default.
• W248282800 hasConcept C185544564 @default.
• W248282800 hasConcept C185592680 @default.
• W248282800 hasConcept C191486275 @default.
• W248282800 hasConcept C191897082 @default.
• W248282800 hasConcept C192562407 @default.
• W248282800 hasConcept C2777855556 @default.
• W248282800 hasConcept C2779227376 @default.
• W248282800 hasConcept C2781028716 @default.
• W248282800 hasConcept C38695641 @default.
• W248282800 hasConcept C41823505 @default.
• W248282800 hasConcept C43617362 @default.
• W248282800 hasConcept C49040817 @default.
• W248282800 hasConcept C520434653 @default.
• W248282800 hasConcept C76308580 @default.
• W248282800 hasConcept C95312477 @default.
• W248282800 hasConceptScore W248282800C110738630 @default.
• W248282800 hasConceptScore W248282800C113196181 @default.
• W248282800 hasConceptScore W248282800C120665830 @default.
• W248282800 hasConceptScore W248282800C121332964 @default.
• W248282800 hasConceptScore W248282800C142199849 @default.
• W248282800 hasConceptScore W248282800C145148216 @default.
• W248282800 hasConceptScore W248282800C146088050 @default.
• W248282800 hasConceptScore W248282800C147120987 @default.
• W248282800 hasConceptScore W248282800C160671074 @default.
• W248282800 hasConceptScore W248282800C171250308 @default.
• W248282800 hasConceptScore W248282800C178790620 @default.
• W248282800 hasConceptScore W248282800C185544564 @default.
• W248282800 hasConceptScore W248282800C185592680 @default.
• W248282800 hasConceptScore W248282800C191486275 @default.
• W248282800 hasConceptScore W248282800C191897082 @default.
• W248282800 hasConceptScore W248282800C192562407 @default.
• W248282800 hasConceptScore W248282800C2777855556 @default.
• W248282800 hasConceptScore W248282800C2779227376 @default.
• W248282800 hasConceptScore W248282800C2781028716 @default.
• W248282800 hasConceptScore W248282800C38695641 @default.
• W248282800 hasConceptScore W248282800C41823505 @default.
• W248282800 hasConceptScore W248282800C43617362 @default.
• W248282800 hasConceptScore W248282800C49040817 @default.
• W248282800 hasConceptScore W248282800C520434653 @default.
• W248282800 hasConceptScore W248282800C76308580 @default.
• W248282800 hasConceptScore W248282800C95312477 @default.
• W248282800 hasLocation W2482828001 @default.
• W248282800 hasOpenAccess W248282800 @default.
• W248282800 hasPrimaryLocation W2482828001 @default.
• W248282800 hasRelatedWork W1483979783 @default.
• W248282800 hasRelatedWork W1516225539 @default.
• W248282800 hasRelatedWork W189711021 @default.
• W248282800 hasRelatedWork W1985676254 @default.
• W248282800 hasRelatedWork W1995266510 @default.
• W248282800 hasRelatedWork W1995844844 @default.
• W248282800 hasRelatedWork W2002078377 @default.
• W248282800 hasRelatedWork W2006183139 @default.
• W248282800 hasRelatedWork W2034570827 @default.
• W248282800 hasRelatedWork W2069295098 @default.
• W248282800 hasRelatedWork W2069994647 @default.
• W248282800 hasRelatedWork W2089221941 @default.
• W248282800 hasRelatedWork W2100960433 @default.
• W248282800 hasRelatedWork W2150678654 @default.
• W248282800 hasRelatedWork W2156497666 @default.
• W248282800 hasRelatedWork W2587989293 @default.
• W248282800 hasRelatedWork W2597711004 @default.
• W248282800 hasRelatedWork W2606063568 @default.
• W248282800 hasRelatedWork W3036015413 @default.
• W248282800 hasRelatedWork W52249104 @default.

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