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- W2484143094 abstract "A traveling-wave resonator and applicators for heating low-resistivity silicon ribbons and wafers have been studied. The performance of the microwave circuit agrees with the theoretical predictions. An applicator for 150 mm (six-inch) diameter wafers is described. Theoretical estimates of temperature distributions and some measured temperature distributions are included." @default.
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- W2484143094 date "1989-01-01" @default.
- W2484143094 modified "2023-09-23" @default.
- W2484143094 title "A Travelling-Wave Reasonator for Heating Low-Resistivity Silicon Ribbons and Wafers" @default.
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- W2484143094 doi "https://doi.org/10.1080/08327823.1989.11688091" @default.
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