Matches in SemOpenAlex for { <https://semopenalex.org/work/W2486201028> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2486201028 startingPage "9" @default.
- W2486201028 abstract "Abstract Methane based gases are often used to produce thin films of biomaterials, such as diamond-like carbon, through Plasma Enhanced Chemical Vapor Deposition. The characterization of the H2 plasma will give a deeper understanding of the physical processes occurring. Understanding these processes could lead to the optimization of the production of these thin films in the future. In this paper, we examine the H2 plasma using a Langmuir probe to gain information on the electron temperature and density of the plasma discharge. We measured electron temperatures of 6eV. Our Langmuir probe data indicates the electron temperature remains constant as the power is increased and the additional energy is used to increase the plasma density at a rate proportional to the increase in power." @default.
- W2486201028 created "2016-08-23" @default.
- W2486201028 creator A5058434292 @default.
- W2486201028 date "2016-01-01" @default.
- W2486201028 modified "2023-09-26" @default.
- W2486201028 title "Power and Langmuir Probe Measurements of H2 RF Plasma" @default.
- W2486201028 hasPublicationYear "2016" @default.
- W2486201028 type Work @default.
- W2486201028 sameAs 2486201028 @default.
- W2486201028 citedByCount "0" @default.
- W2486201028 crossrefType "journal-article" @default.
- W2486201028 hasAuthorship W2486201028A5058434292 @default.
- W2486201028 hasConcept C113196181 @default.
- W2486201028 hasConcept C115958267 @default.
- W2486201028 hasConcept C121332964 @default.
- W2486201028 hasConcept C125485243 @default.
- W2486201028 hasConcept C147789679 @default.
- W2486201028 hasConcept C171250308 @default.
- W2486201028 hasConcept C176118016 @default.
- W2486201028 hasConcept C184651966 @default.
- W2486201028 hasConcept C184779094 @default.
- W2486201028 hasConcept C185592680 @default.
- W2486201028 hasConcept C19067145 @default.
- W2486201028 hasConcept C192039680 @default.
- W2486201028 hasConcept C192562407 @default.
- W2486201028 hasConcept C43503373 @default.
- W2486201028 hasConcept C43617362 @default.
- W2486201028 hasConcept C57410435 @default.
- W2486201028 hasConcept C62520636 @default.
- W2486201028 hasConcept C82706917 @default.
- W2486201028 hasConceptScore W2486201028C113196181 @default.
- W2486201028 hasConceptScore W2486201028C115958267 @default.
- W2486201028 hasConceptScore W2486201028C121332964 @default.
- W2486201028 hasConceptScore W2486201028C125485243 @default.
- W2486201028 hasConceptScore W2486201028C147789679 @default.
- W2486201028 hasConceptScore W2486201028C171250308 @default.
- W2486201028 hasConceptScore W2486201028C176118016 @default.
- W2486201028 hasConceptScore W2486201028C184651966 @default.
- W2486201028 hasConceptScore W2486201028C184779094 @default.
- W2486201028 hasConceptScore W2486201028C185592680 @default.
- W2486201028 hasConceptScore W2486201028C19067145 @default.
- W2486201028 hasConceptScore W2486201028C192039680 @default.
- W2486201028 hasConceptScore W2486201028C192562407 @default.
- W2486201028 hasConceptScore W2486201028C43503373 @default.
- W2486201028 hasConceptScore W2486201028C43617362 @default.
- W2486201028 hasConceptScore W2486201028C57410435 @default.
- W2486201028 hasConceptScore W2486201028C62520636 @default.
- W2486201028 hasConceptScore W2486201028C82706917 @default.
- W2486201028 hasIssue "1" @default.
- W2486201028 hasLocation W24862010281 @default.
- W2486201028 hasOpenAccess W2486201028 @default.
- W2486201028 hasPrimaryLocation W24862010281 @default.
- W2486201028 hasRelatedWork W1970353570 @default.
- W2486201028 hasRelatedWork W1971139910 @default.
- W2486201028 hasRelatedWork W2003808490 @default.
- W2486201028 hasRelatedWork W2006611698 @default.
- W2486201028 hasRelatedWork W2033185564 @default.
- W2486201028 hasRelatedWork W2060839498 @default.
- W2486201028 hasRelatedWork W2149425362 @default.
- W2486201028 hasRelatedWork W2155752420 @default.
- W2486201028 hasRelatedWork W2159633716 @default.
- W2486201028 hasRelatedWork W2363514733 @default.
- W2486201028 hasRelatedWork W2392133481 @default.
- W2486201028 hasRelatedWork W2517565822 @default.
- W2486201028 hasRelatedWork W2763586807 @default.
- W2486201028 hasRelatedWork W3105121883 @default.
- W2486201028 hasRelatedWork W3134361517 @default.
- W2486201028 hasRelatedWork W818566784 @default.
- W2486201028 hasRelatedWork W1656097469 @default.
- W2486201028 hasRelatedWork W2133432655 @default.
- W2486201028 hasRelatedWork W2500942699 @default.
- W2486201028 hasRelatedWork W3111606483 @default.
- W2486201028 hasVolume "4" @default.
- W2486201028 isParatext "false" @default.
- W2486201028 isRetracted "false" @default.
- W2486201028 magId "2486201028" @default.
- W2486201028 workType "article" @default.