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- W2486799058 endingPage "10" @default.
- W2486799058 startingPage "1" @default.
- W2486799058 abstract "The application of optical signal processing techniques for the inspection of integrated circuit photomasks, could prove to be a fast and cheap means of photomask inspection. In this paper we discuss two possible optical inspection techniques and their suitability for use as a practical inspection tool." @default.
- W2486799058 created "2016-08-23" @default.
- W2486799058 creator A5048241730 @default.
- W2486799058 creator A5055830691 @default.
- W2486799058 date "1986-01-01" @default.
- W2486799058 modified "2023-09-27" @default.
- W2486799058 title "Inspection of Integrated Circuit Photomasks using Optical Data Processing Techniques" @default.
- W2486799058 cites W593466592 @default.
- W2486799058 doi "https://doi.org/10.1080/00223638.1986.11738384" @default.
- W2486799058 hasPublicationYear "1986" @default.
- W2486799058 type Work @default.
- W2486799058 sameAs 2486799058 @default.
- W2486799058 citedByCount "0" @default.
- W2486799058 crossrefType "journal-article" @default.
- W2486799058 hasAuthorship W2486799058A5048241730 @default.
- W2486799058 hasAuthorship W2486799058A5055830691 @default.
- W2486799058 hasConcept C111919701 @default.
- W2486799058 hasConcept C115961682 @default.
- W2486799058 hasConcept C146920229 @default.
- W2486799058 hasConcept C14737013 @default.
- W2486799058 hasConcept C154945302 @default.
- W2486799058 hasConcept C159985019 @default.
- W2486799058 hasConcept C164830781 @default.
- W2486799058 hasConcept C192562407 @default.
- W2486799058 hasConcept C2779227376 @default.
- W2486799058 hasConcept C41008148 @default.
- W2486799058 hasConcept C530198007 @default.
- W2486799058 hasConcept C53524968 @default.
- W2486799058 hasConcept C78371743 @default.
- W2486799058 hasConcept C9390403 @default.
- W2486799058 hasConcept C9417928 @default.
- W2486799058 hasConcept C98045186 @default.
- W2486799058 hasConceptScore W2486799058C111919701 @default.
- W2486799058 hasConceptScore W2486799058C115961682 @default.
- W2486799058 hasConceptScore W2486799058C146920229 @default.
- W2486799058 hasConceptScore W2486799058C14737013 @default.
- W2486799058 hasConceptScore W2486799058C154945302 @default.
- W2486799058 hasConceptScore W2486799058C159985019 @default.
- W2486799058 hasConceptScore W2486799058C164830781 @default.
- W2486799058 hasConceptScore W2486799058C192562407 @default.
- W2486799058 hasConceptScore W2486799058C2779227376 @default.
- W2486799058 hasConceptScore W2486799058C41008148 @default.
- W2486799058 hasConceptScore W2486799058C530198007 @default.
- W2486799058 hasConceptScore W2486799058C53524968 @default.
- W2486799058 hasConceptScore W2486799058C78371743 @default.
- W2486799058 hasConceptScore W2486799058C9390403 @default.
- W2486799058 hasConceptScore W2486799058C9417928 @default.
- W2486799058 hasConceptScore W2486799058C98045186 @default.
- W2486799058 hasIssue "1" @default.
- W2486799058 hasLocation W24867990581 @default.
- W2486799058 hasOpenAccess W2486799058 @default.
- W2486799058 hasPrimaryLocation W24867990581 @default.
- W2486799058 hasRelatedWork W1997889974 @default.
- W2486799058 hasRelatedWork W2029829543 @default.
- W2486799058 hasRelatedWork W2054829334 @default.
- W2486799058 hasRelatedWork W2070870894 @default.
- W2486799058 hasRelatedWork W2079296304 @default.
- W2486799058 hasRelatedWork W2334921612 @default.
- W2486799058 hasRelatedWork W2486799058 @default.
- W2486799058 hasRelatedWork W2526713846 @default.
- W2486799058 hasRelatedWork W2528035728 @default.
- W2486799058 hasRelatedWork W8605755 @default.
- W2486799058 hasVolume "34" @default.
- W2486799058 isParatext "false" @default.
- W2486799058 isRetracted "false" @default.
- W2486799058 magId "2486799058" @default.
- W2486799058 workType "article" @default.