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- W2487331924 abstract "SUMMARY Ultrasonic sensor was fabricated from silicon membrane of about 1.5~ thick by using anisotropic etching technique. Ths thin membrane is fairly strong and the 4mm square membrane is not broken by the pressure deference of 760Torr. The sensor has a condenser-microphone structure with glass balls of about l0p.m &ameter as spacers. The sensitivity of the sensor having a 4mm square membrane for the 40kE ultrasonic wave is G7pVPa when the applied voltage to the sensor is 18V. The frequency dependence of the sensitivity is flat in the frequency region over 1MIz. Angular dependence of the sensitivity for 40kHz ultrasonic wave is close to that of the line antenna and the sensitivity becomes sharp as the membrane becomes large." @default.
- W2487331924 created "2016-08-23" @default.
- W2487331924 creator A5043007236 @default.
- W2487331924 creator A5058775745 @default.
- W2487331924 creator A5073836503 @default.
- W2487331924 date "2005-08-25" @default.
- W2487331924 modified "2023-09-27" @default.
- W2487331924 title "Fabrication Of Ultrasonic Sensor Using Silicon Membrane" @default.
- W2487331924 cites W2025257143 @default.
- W2487331924 cites W2179402527 @default.
- W2487331924 doi "https://doi.org/10.1109/sensor.1995.721907" @default.
- W2487331924 hasPublicationYear "2005" @default.
- W2487331924 type Work @default.
- W2487331924 sameAs 2487331924 @default.
- W2487331924 citedByCount "4" @default.
- W2487331924 crossrefType "proceedings-article" @default.
- W2487331924 hasAuthorship W2487331924A5043007236 @default.
- W2487331924 hasAuthorship W2487331924A5058775745 @default.
- W2487331924 hasAuthorship W2487331924A5073836503 @default.
- W2487331924 hasConcept C100460472 @default.
- W2487331924 hasConcept C121332964 @default.
- W2487331924 hasConcept C127413603 @default.
- W2487331924 hasConcept C159985019 @default.
- W2487331924 hasConcept C185592680 @default.
- W2487331924 hasConcept C192562407 @default.
- W2487331924 hasConcept C21200559 @default.
- W2487331924 hasConcept C24326235 @default.
- W2487331924 hasConcept C24890656 @default.
- W2487331924 hasConcept C2778263558 @default.
- W2487331924 hasConcept C2779227376 @default.
- W2487331924 hasConcept C41625074 @default.
- W2487331924 hasConcept C49040817 @default.
- W2487331924 hasConcept C544956773 @default.
- W2487331924 hasConcept C55493867 @default.
- W2487331924 hasConcept C58772458 @default.
- W2487331924 hasConcept C68115822 @default.
- W2487331924 hasConcept C81288441 @default.
- W2487331924 hasConceptScore W2487331924C100460472 @default.
- W2487331924 hasConceptScore W2487331924C121332964 @default.
- W2487331924 hasConceptScore W2487331924C127413603 @default.
- W2487331924 hasConceptScore W2487331924C159985019 @default.
- W2487331924 hasConceptScore W2487331924C185592680 @default.
- W2487331924 hasConceptScore W2487331924C192562407 @default.
- W2487331924 hasConceptScore W2487331924C21200559 @default.
- W2487331924 hasConceptScore W2487331924C24326235 @default.
- W2487331924 hasConceptScore W2487331924C24890656 @default.
- W2487331924 hasConceptScore W2487331924C2778263558 @default.
- W2487331924 hasConceptScore W2487331924C2779227376 @default.
- W2487331924 hasConceptScore W2487331924C41625074 @default.
- W2487331924 hasConceptScore W2487331924C49040817 @default.
- W2487331924 hasConceptScore W2487331924C544956773 @default.
- W2487331924 hasConceptScore W2487331924C55493867 @default.
- W2487331924 hasConceptScore W2487331924C58772458 @default.
- W2487331924 hasConceptScore W2487331924C68115822 @default.
- W2487331924 hasConceptScore W2487331924C81288441 @default.
- W2487331924 hasLocation W24873319241 @default.
- W2487331924 hasOpenAccess W2487331924 @default.
- W2487331924 hasPrimaryLocation W24873319241 @default.
- W2487331924 hasRelatedWork W1572815533 @default.
- W2487331924 hasRelatedWork W1577514297 @default.
- W2487331924 hasRelatedWork W1989721890 @default.
- W2487331924 hasRelatedWork W2013079801 @default.
- W2487331924 hasRelatedWork W2015360240 @default.
- W2487331924 hasRelatedWork W2038046998 @default.
- W2487331924 hasRelatedWork W2060274642 @default.
- W2487331924 hasRelatedWork W2062926325 @default.
- W2487331924 hasRelatedWork W2069451163 @default.
- W2487331924 hasRelatedWork W2098871361 @default.
- W2487331924 hasRelatedWork W2111831687 @default.
- W2487331924 hasRelatedWork W2125245986 @default.
- W2487331924 hasRelatedWork W2140807890 @default.
- W2487331924 hasRelatedWork W2152699818 @default.
- W2487331924 hasRelatedWork W2154623958 @default.
- W2487331924 hasRelatedWork W2624076884 @default.
- W2487331924 hasRelatedWork W3023093879 @default.
- W2487331924 hasRelatedWork W3136803312 @default.
- W2487331924 hasRelatedWork W3198150626 @default.
- W2487331924 hasRelatedWork W3002322502 @default.
- W2487331924 isParatext "false" @default.
- W2487331924 isRetracted "false" @default.
- W2487331924 magId "2487331924" @default.
- W2487331924 workType "article" @default.