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- W2487507777 abstract "Over the last fifty-plus years, the increased complexity and speed of integrated circuits have radically changed our world. Today, semiconductor manufacturing is perhaps the most important segment of" @default.
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- W2487507777 date "2013-01-01" @default.
- W2487507777 modified "2023-10-15" @default.
- W2487507777 title "Production Planning and Control for Semiconductor Wafer Fabrication Facilities" @default.
- W2487507777 doi "https://doi.org/10.1007/978-1-4614-4472-5" @default.
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