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- W2488334714 abstract "Small charged dust grains or ``particulates`` are observed in a wide variety of plasma environments, ranging from low-pressure discharges used in industrial applications to the interstellar medium. As plasmas have been increasingly used in industrial materials processing, the presence of particulate contamination has been recognized to pose serious problems for product yield and reliability. If the particulate density is sufficiently high, the interparticle potential energies may substantially exceed their thermal kinetic energies, and the particulate system then exhibits behavior similar to a liquid or the classical one-component plasma. In thermal equilibrium, the particulate system may be well approximated by the Yukawa system, where the interparticle potential is given by the screened Coulomb potential {Psi}(r) = (Q{sup 2}/4{pi}{epsilon}{sub 0}r) exp ({minus}r/{lambda}) with {minus}Q and lambda being the charge on each particulate and the characteristic Debye length of the back ground plasma. Using N-body molecular dynamical simulations with appropriate periodic boundary conditions, the authors determine the conditions for the phase transition (i.e., freezing and melting) and obtain the equation of state for the particulate system. In non-uniform, unmagnetized plasmas with low particulate densities, the transport of particulates may be determined by the total force on each particulate. The authors shall present themore » results of numerical calculations of these forces under realistic conditions for low-pressure etching/deposition plasmas.« less" @default.
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- W2488334714 date "1994-12-31" @default.
- W2488334714 modified "2023-09-24" @default.
- W2488334714 title "Dynamics of charged particulates in plasmas" @default.
- W2488334714 hasPublicationYear "1994" @default.
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