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- W2488456525 abstract "Focused Ion Beam (FIB) is one of the state of the art micro/nano fabrication tools. It adopts both bottom-up and top-down approaches to generate micro/nano structures and the biggest advantage of FIB lies in its maskless fabrication capability. The efficacy of the machine is now well proven among the scientific community. Modern FIB systems offer highly focused and precised beam of ions, which are effectively used for fabricating precised, high aspect ratio micro/nano structures." @default.
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- W2488456525 date "2015-01-01" @default.
- W2488456525 modified "2023-10-17" @default.
- W2488456525 title "FIB Micro-/Nano-fabrication" @default.
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- W2488456525 doi "https://doi.org/10.1016/b978-0-323-31149-6.00003-7" @default.
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