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- W2488641946 endingPage "704" @default.
- W2488641946 startingPage "693" @default.
- W2488641946 abstract "The polymerization of two α,β-unsaturated acylsilanes, 1-trimethylsilyl-2-propen-1-one (vinyl trimethylsilyl ketone, VTMSK) and 1-trimethylsilyl-2-methyl-2-propen-1-one (isopropenyl trimethylsilyl ketone, IPTMSK) was studied. VTMSK polymerized readily under free-radical-initiation conditions to give a well-defined, highly soluble, high-molecular-weight polymer. Exposure of thin films of this polymer to mid- and deep-UV radiation or heating at <100 °C led to a rearrangement of the acylsilane moiety. The resulting polymer exhibited an increased solubility in 2-propanol and had imaging properties. The polymer exhibited good stability under O2 reactive-ion-etching conditions. Attempts to obtain a high-molecular-weight polymer of IPTMSK by either free-radical or anionic initiation have not been successful." @default.
- W2488641946 created "2016-08-23" @default.
- W2488641946 creator A5004348362 @default.
- W2488641946 creator A5039602436 @default.
- W2488641946 creator A5060591151 @default.
- W2488641946 date "1989-05-05" @default.
- W2488641946 modified "2023-09-26" @default.
- W2488641946 title "Synthesis and Lithographic Evaluation of a Poly(acylsilane)" @default.
- W2488641946 doi "https://doi.org/10.1021/ba-1990-0224.ch039" @default.
- W2488641946 hasPublicationYear "1989" @default.
- W2488641946 type Work @default.
- W2488641946 sameAs 2488641946 @default.
- W2488641946 citedByCount "1" @default.
- W2488641946 countsByYear W24886419462021 @default.
- W2488641946 crossrefType "book-chapter" @default.
- W2488641946 hasAuthorship W2488641946A5004348362 @default.
- W2488641946 hasAuthorship W2488641946A5039602436 @default.
- W2488641946 hasAuthorship W2488641946A5060591151 @default.
- W2488641946 hasConcept C178790620 @default.
- W2488641946 hasConcept C185592680 @default.
- W2488641946 hasConcept C188027245 @default.
- W2488641946 hasConcept C192562407 @default.
- W2488641946 hasConcept C2776568683 @default.
- W2488641946 hasConcept C2777000832 @default.
- W2488641946 hasConcept C2777738585 @default.
- W2488641946 hasConcept C44228677 @default.
- W2488641946 hasConcept C521977710 @default.
- W2488641946 hasConcept C75473681 @default.
- W2488641946 hasConceptScore W2488641946C178790620 @default.
- W2488641946 hasConceptScore W2488641946C185592680 @default.
- W2488641946 hasConceptScore W2488641946C188027245 @default.
- W2488641946 hasConceptScore W2488641946C192562407 @default.
- W2488641946 hasConceptScore W2488641946C2776568683 @default.
- W2488641946 hasConceptScore W2488641946C2777000832 @default.
- W2488641946 hasConceptScore W2488641946C2777738585 @default.
- W2488641946 hasConceptScore W2488641946C44228677 @default.
- W2488641946 hasConceptScore W2488641946C521977710 @default.
- W2488641946 hasConceptScore W2488641946C75473681 @default.
- W2488641946 hasLocation W24886419461 @default.
- W2488641946 hasOpenAccess W2488641946 @default.
- W2488641946 hasPrimaryLocation W24886419461 @default.
- W2488641946 hasRelatedWork W1986199869 @default.
- W2488641946 hasRelatedWork W2020448315 @default.
- W2488641946 hasRelatedWork W2048735183 @default.
- W2488641946 hasRelatedWork W2088249332 @default.
- W2488641946 hasRelatedWork W2138395390 @default.
- W2488641946 hasRelatedWork W2314745028 @default.
- W2488641946 hasRelatedWork W2547437702 @default.
- W2488641946 hasRelatedWork W2787102811 @default.
- W2488641946 hasRelatedWork W3150092650 @default.
- W2488641946 hasRelatedWork W2513074684 @default.
- W2488641946 isParatext "false" @default.
- W2488641946 isRetracted "false" @default.
- W2488641946 magId "2488641946" @default.
- W2488641946 workType "book-chapter" @default.