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- W2489843390 abstract "To reduce the alignment difficulty and achieve high diffraction efficiency, a self-aligned method for fabricating large-aperture multi-level Fresnel membrane optic is proposed. Using this method, the rigorous alignment is avoided during fabrication process and high diffraction efficiency is achieved. A 4-level Fresnel diffractive polyimide membrane optic in 200 mm diameter and 20 μm thickness was manufactured by this method, which exhibits about 63% diffraction efficiency into the +1 order. The thickness variation of the membrane has a RMS of 30 nm." @default.
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- W2489843390 date "2016-10-01" @default.
- W2489843390 modified "2023-09-22" @default.
- W2489843390 title "Fabrication of large-aperture and high efficiency Fresnel diffractive membrane optic using a self-aligned method" @default.
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- W2489843390 doi "https://doi.org/10.1016/j.ijleo.2016.07.055" @default.
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