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- W2492016880 abstract "A highly metallized cobalt-clusterized polyferrocenylsilane (Co-PFS) has been patterned using electron-beam lithography, UV-photolithography and a selective dewetting soft lithographic process. Subsequent pyrolysis and/or plasma reactive ion etching to fabricate metal-containing magnetic ceramic films has been demonstrated." @default.
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- W2492016880 date "2006-03-23" @default.
- W2492016880 modified "2023-10-14" @default.
- W2492016880 title "Lithographic Patterning and Reactive Ion Etching of a Highly Metallized Polyferrocenylsilane" @default.
- W2492016880 doi "https://doi.org/10.1021/bk-2006-0928.ch022" @default.
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