Matches in SemOpenAlex for { <https://semopenalex.org/work/W2492642011> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W2492642011 endingPage "277" @default.
- W2492642011 startingPage "266" @default.
- W2492642011 abstract "Over the past two years rapid progress has been made in the design of high-numerical-aperture imaging systems for lithography using radiation at the edge of the vacuum ultraviolet. These systems soon will be prototyped for VLSI manufacturing applications. Because of the combination of excess optical absorption in polymers and the small depth-of-focus of the new optical systems, many traditional photoresist principles are no longer useful at these short UV wavelengths. Here, we summarize the technology issues and several recent approaches to developing new photoresist materials and new chemical mechanisms for imaging at these wavelengths. The four areas of research outlined are use of silylation processes in surface imaging, bilayer resist schemes as alternatives to single-layer resists, development of an adlayer dosing technique based on molecular layer reactions, and use of dry planarization layer and imaging layer deposition to enable an all-dry 193-nm photolithography sequence. More details on much of the work described can be found in the references cited." @default.
- W2492642011 created "2016-08-23" @default.
- W2492642011 creator A5007579053 @default.
- W2492642011 creator A5029108154 @default.
- W2492642011 creator A5038772767 @default.
- W2492642011 creator A5058145238 @default.
- W2492642011 creator A5076026607 @default.
- W2492642011 date "1993-04-13" @default.
- W2492642011 modified "2023-09-25" @default.
- W2492642011 title "New Photoresist Processes at UV Wavelengths Less Than 200 Nanometers" @default.
- W2492642011 doi "https://doi.org/10.1021/bk-1993-0527.ch017" @default.
- W2492642011 hasPublicationYear "1993" @default.
- W2492642011 type Work @default.
- W2492642011 sameAs 2492642011 @default.
- W2492642011 citedByCount "0" @default.
- W2492642011 crossrefType "book-chapter" @default.
- W2492642011 hasAuthorship W2492642011A5007579053 @default.
- W2492642011 hasAuthorship W2492642011A5029108154 @default.
- W2492642011 hasAuthorship W2492642011A5038772767 @default.
- W2492642011 hasAuthorship W2492642011A5058145238 @default.
- W2492642011 hasAuthorship W2492642011A5076026607 @default.
- W2492642011 hasConcept C105487726 @default.
- W2492642011 hasConcept C120665830 @default.
- W2492642011 hasConcept C121332964 @default.
- W2492642011 hasConcept C134406635 @default.
- W2492642011 hasConcept C162996421 @default.
- W2492642011 hasConcept C171250308 @default.
- W2492642011 hasConcept C180088628 @default.
- W2492642011 hasConcept C192562407 @default.
- W2492642011 hasConcept C204223013 @default.
- W2492642011 hasConcept C2776798109 @default.
- W2492642011 hasConcept C2779227376 @default.
- W2492642011 hasConcept C33574316 @default.
- W2492642011 hasConcept C49040817 @default.
- W2492642011 hasConcept C53524968 @default.
- W2492642011 hasConcept C6260449 @default.
- W2492642011 hasConceptScore W2492642011C105487726 @default.
- W2492642011 hasConceptScore W2492642011C120665830 @default.
- W2492642011 hasConceptScore W2492642011C121332964 @default.
- W2492642011 hasConceptScore W2492642011C134406635 @default.
- W2492642011 hasConceptScore W2492642011C162996421 @default.
- W2492642011 hasConceptScore W2492642011C171250308 @default.
- W2492642011 hasConceptScore W2492642011C180088628 @default.
- W2492642011 hasConceptScore W2492642011C192562407 @default.
- W2492642011 hasConceptScore W2492642011C204223013 @default.
- W2492642011 hasConceptScore W2492642011C2776798109 @default.
- W2492642011 hasConceptScore W2492642011C2779227376 @default.
- W2492642011 hasConceptScore W2492642011C33574316 @default.
- W2492642011 hasConceptScore W2492642011C49040817 @default.
- W2492642011 hasConceptScore W2492642011C53524968 @default.
- W2492642011 hasConceptScore W2492642011C6260449 @default.
- W2492642011 hasLocation W24926420111 @default.
- W2492642011 hasOpenAccess W2492642011 @default.
- W2492642011 hasPrimaryLocation W24926420111 @default.
- W2492642011 hasRelatedWork W1008141977 @default.
- W2492642011 hasRelatedWork W1513422997 @default.
- W2492642011 hasRelatedWork W1984343152 @default.
- W2492642011 hasRelatedWork W2017559628 @default.
- W2492642011 hasRelatedWork W2036968101 @default.
- W2492642011 hasRelatedWork W2046826486 @default.
- W2492642011 hasRelatedWork W2080447637 @default.
- W2492642011 hasRelatedWork W2306672908 @default.
- W2492642011 hasRelatedWork W2790813161 @default.
- W2492642011 hasRelatedWork W3186960831 @default.
- W2492642011 isParatext "false" @default.
- W2492642011 isRetracted "false" @default.
- W2492642011 magId "2492642011" @default.
- W2492642011 workType "book-chapter" @default.