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- W2494196055 abstract "The elastic properties of thin film ZnO have been measured by attaching a Si-ZnO strip to a ceramic bimorph, deflecting the latter with an electric signal and measuring the resonance frequencies of the Si-ZnO strip which are determined by the elastic moduli of ZnO and Si. The elastic modulus of Si is known and hence, from the resonance frequency of the beam, the elastic modulus of ZnO can be calculated. Results obtained are presented in this report." @default.
- W2494196055 created "2016-08-23" @default.
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- W2494196055 date "2002-11-27" @default.
- W2494196055 modified "2023-09-25" @default.
- W2494196055 title "Measurement of elastic properties of thin film ZnO by resonance method" @default.
- W2494196055 cites W2030575140 @default.
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- W2494196055 doi "https://doi.org/10.1109/freq.1998.717988" @default.
- W2494196055 hasPublicationYear "2002" @default.
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