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- W2495014796 abstract "Single crystal silicon surfaces ((111) n-type with resistivity of approximately 30-Ωcm) were scratched at room temperature by a dead-loaded spherical diamond indenter (0.49-1.96 N) that was translated in the [110] direction at a speed of 5cm/sec. The scratches were placed between four electrical pads through which the resistivity of the damage region can be recorded. The surface of the silicon was covered with a commercial lubricant additive and the concentration of the additive and the load on the diamond were systematically varied. The change in voltage as a function of time was dependent on the concentration of the lubricant additive. This suggested that the adsorption and electrolytic properties of the lubricant additive are related to the extent of the subsurface damage produced by the diamond." @default.
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- W2495014796 date "1992-03-23" @default.
- W2495014796 modified "2023-09-23" @default.
- W2495014796 title "Kinetics of Damage Generation on Single-Crystal Silicon Surfaces" @default.
- W2495014796 doi "https://doi.org/10.1021/bk-1992-0485.ch014" @default.
- W2495014796 hasPublicationYear "1992" @default.
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