Matches in SemOpenAlex for { <https://semopenalex.org/work/W2495313610> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2495313610 abstract "The main focus of the paper is the development of technological process for the production of complex 3D microstructure, from designing it by using computer generated holography to its physical 3D patterning by exploiting the process of electron beam lithography. The logo image was chosen for numerical generation, which was performed by using Gerchberg–Saxton algorithm for computer generated hologram design. Physical implementation of microstructure was performed by using a single layer polymethyl methacrylate (PMMA) as a basis for 3D microstructure, which was exposed by using e-beam lithography system e-LINEplus. After production, verification of 3D microstructure is performed by exposing it under the laser beam and qualitative analysis is performed by using atomic force microscope. Finally, improvement of mass production of complex microstructures, designed by using computer generated holography, is presented." @default.
- W2495313610 created "2016-08-23" @default.
- W2495313610 creator A5000904512 @default.
- W2495313610 creator A5017151715 @default.
- W2495313610 creator A5037420960 @default.
- W2495313610 creator A5076457211 @default.
- W2495313610 creator A5082293434 @default.
- W2495313610 date "2016-01-01" @default.
- W2495313610 modified "2023-09-27" @default.
- W2495313610 title "Vibration Based Microstructure Replication and Analysis" @default.
- W2495313610 cites W11199517 @default.
- W2495313610 cites W1493952308 @default.
- W2495313610 cites W157181132 @default.
- W2495313610 cites W1971638518 @default.
- W2495313610 cites W1994464352 @default.
- W2495313610 cites W1994728170 @default.
- W2495313610 cites W2015120864 @default.
- W2495313610 cites W2021545744 @default.
- W2495313610 cites W2042730562 @default.
- W2495313610 cites W2045723063 @default.
- W2495313610 cites W2055379954 @default.
- W2495313610 cites W2059117005 @default.
- W2495313610 cites W2062404710 @default.
- W2495313610 cites W2063674836 @default.
- W2495313610 cites W2104913583 @default.
- W2495313610 cites W2153269503 @default.
- W2495313610 cites W2963824965 @default.
- W2495313610 doi "https://doi.org/10.1007/978-94-017-7593-9_13" @default.
- W2495313610 hasPublicationYear "2016" @default.
- W2495313610 type Work @default.
- W2495313610 sameAs 2495313610 @default.
- W2495313610 citedByCount "0" @default.
- W2495313610 crossrefType "book-chapter" @default.
- W2495313610 hasAuthorship W2495313610A5000904512 @default.
- W2495313610 hasAuthorship W2495313610A5017151715 @default.
- W2495313610 hasAuthorship W2495313610A5037420960 @default.
- W2495313610 hasAuthorship W2495313610A5076457211 @default.
- W2495313610 hasAuthorship W2495313610A5082293434 @default.
- W2495313610 hasConcept C105795698 @default.
- W2495313610 hasConcept C120665830 @default.
- W2495313610 hasConcept C121332964 @default.
- W2495313610 hasConcept C12590798 @default.
- W2495313610 hasConcept C159985019 @default.
- W2495313610 hasConcept C187590223 @default.
- W2495313610 hasConcept C192562407 @default.
- W2495313610 hasConcept C204223013 @default.
- W2495313610 hasConcept C33923547 @default.
- W2495313610 hasConcept C41008148 @default.
- W2495313610 hasConcept C49040817 @default.
- W2495313610 hasConcept C67558686 @default.
- W2495313610 hasConcept C87976508 @default.
- W2495313610 hasConceptScore W2495313610C105795698 @default.
- W2495313610 hasConceptScore W2495313610C120665830 @default.
- W2495313610 hasConceptScore W2495313610C121332964 @default.
- W2495313610 hasConceptScore W2495313610C12590798 @default.
- W2495313610 hasConceptScore W2495313610C159985019 @default.
- W2495313610 hasConceptScore W2495313610C187590223 @default.
- W2495313610 hasConceptScore W2495313610C192562407 @default.
- W2495313610 hasConceptScore W2495313610C204223013 @default.
- W2495313610 hasConceptScore W2495313610C33923547 @default.
- W2495313610 hasConceptScore W2495313610C41008148 @default.
- W2495313610 hasConceptScore W2495313610C49040817 @default.
- W2495313610 hasConceptScore W2495313610C67558686 @default.
- W2495313610 hasConceptScore W2495313610C87976508 @default.
- W2495313610 hasLocation W24953136101 @default.
- W2495313610 hasOpenAccess W2495313610 @default.
- W2495313610 hasPrimaryLocation W24953136101 @default.
- W2495313610 hasRelatedWork W1507201337 @default.
- W2495313610 hasRelatedWork W1530592251 @default.
- W2495313610 hasRelatedWork W1964570711 @default.
- W2495313610 hasRelatedWork W1964727694 @default.
- W2495313610 hasRelatedWork W1996959727 @default.
- W2495313610 hasRelatedWork W2020693436 @default.
- W2495313610 hasRelatedWork W2062193580 @default.
- W2495313610 hasRelatedWork W2089314237 @default.
- W2495313610 hasRelatedWork W2092260070 @default.
- W2495313610 hasRelatedWork W2106586415 @default.
- W2495313610 hasRelatedWork W2114264270 @default.
- W2495313610 hasRelatedWork W2364617531 @default.
- W2495313610 hasRelatedWork W2367253344 @default.
- W2495313610 hasRelatedWork W2379748753 @default.
- W2495313610 hasRelatedWork W2389856406 @default.
- W2495313610 hasRelatedWork W2896324058 @default.
- W2495313610 hasRelatedWork W2901644384 @default.
- W2495313610 hasRelatedWork W2904631546 @default.
- W2495313610 hasRelatedWork W788111952 @default.
- W2495313610 hasRelatedWork W2838921754 @default.
- W2495313610 isParatext "false" @default.
- W2495313610 isRetracted "false" @default.
- W2495313610 magId "2495313610" @default.
- W2495313610 workType "book-chapter" @default.