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- W2496645360 abstract "Inductively Coupled Plasma Reactive Ion Etching (ICPRIE) of Gallium Arsenide (GaAs) using BCl3/Cl2/Ar plasma was carried out for Photonic Crystal (PhC) applications. The recipe was optimized by varying various etch parameters. While the addition of N2 improved sidewall angle, the surface roughness increased for N2 flow rate beyond 1 sccm. An optimized BCl3/Cl2/Ar/N2 recipe with flow rate 6/1/11/1 sccm was used to etch holes in GaAs. For 4 μm diameter circular pattern, etch rate of about 556 nm/min with a sidewall angle of 86° and surface roughness of the order 1 nm were obtained." @default.
- W2496645360 created "2016-08-23" @default.
- W2496645360 creator A5016990138 @default.
- W2496645360 creator A5043061022 @default.
- W2496645360 creator A5073534604 @default.
- W2496645360 creator A5074702961 @default.
- W2496645360 date "2014-01-01" @default.
- W2496645360 modified "2023-09-28" @default.
- W2496645360 title "Inductively Coupled Plasma Etching of GaAs with High Anisotropy for Photonics Applications" @default.
- W2496645360 cites W1963926839 @default.
- W2496645360 cites W2020386325 @default.
- W2496645360 cites W2022322490 @default.
- W2496645360 cites W2131741928 @default.
- W2496645360 cites W4246621048 @default.
- W2496645360 doi "https://doi.org/10.1007/978-3-319-03002-9_175" @default.
- W2496645360 hasPublicationYear "2014" @default.
- W2496645360 type Work @default.
- W2496645360 sameAs 2496645360 @default.
- W2496645360 citedByCount "1" @default.
- W2496645360 countsByYear W24966453602018 @default.
- W2496645360 crossrefType "book-chapter" @default.
- W2496645360 hasAuthorship W2496645360A5016990138 @default.
- W2496645360 hasAuthorship W2496645360A5043061022 @default.
- W2496645360 hasAuthorship W2496645360A5073534604 @default.
- W2496645360 hasAuthorship W2496645360A5074702961 @default.
- W2496645360 hasConcept C100460472 @default.
- W2496645360 hasConcept C107187091 @default.
- W2496645360 hasConcept C107365816 @default.
- W2496645360 hasConcept C113196181 @default.
- W2496645360 hasConcept C120665830 @default.
- W2496645360 hasConcept C121332964 @default.
- W2496645360 hasConcept C130472188 @default.
- W2496645360 hasConcept C159985019 @default.
- W2496645360 hasConcept C171250308 @default.
- W2496645360 hasConcept C172120300 @default.
- W2496645360 hasConcept C185592680 @default.
- W2496645360 hasConcept C192562407 @default.
- W2496645360 hasConcept C2777122791 @default.
- W2496645360 hasConcept C2779227376 @default.
- W2496645360 hasConcept C43617362 @default.
- W2496645360 hasConcept C49040817 @default.
- W2496645360 hasConcept C510052550 @default.
- W2496645360 hasConcept C62520636 @default.
- W2496645360 hasConcept C71039073 @default.
- W2496645360 hasConcept C82706917 @default.
- W2496645360 hasConcept C85725439 @default.
- W2496645360 hasConcept C95974651 @default.
- W2496645360 hasConceptScore W2496645360C100460472 @default.
- W2496645360 hasConceptScore W2496645360C107187091 @default.
- W2496645360 hasConceptScore W2496645360C107365816 @default.
- W2496645360 hasConceptScore W2496645360C113196181 @default.
- W2496645360 hasConceptScore W2496645360C120665830 @default.
- W2496645360 hasConceptScore W2496645360C121332964 @default.
- W2496645360 hasConceptScore W2496645360C130472188 @default.
- W2496645360 hasConceptScore W2496645360C159985019 @default.
- W2496645360 hasConceptScore W2496645360C171250308 @default.
- W2496645360 hasConceptScore W2496645360C172120300 @default.
- W2496645360 hasConceptScore W2496645360C185592680 @default.
- W2496645360 hasConceptScore W2496645360C192562407 @default.
- W2496645360 hasConceptScore W2496645360C2777122791 @default.
- W2496645360 hasConceptScore W2496645360C2779227376 @default.
- W2496645360 hasConceptScore W2496645360C43617362 @default.
- W2496645360 hasConceptScore W2496645360C49040817 @default.
- W2496645360 hasConceptScore W2496645360C510052550 @default.
- W2496645360 hasConceptScore W2496645360C62520636 @default.
- W2496645360 hasConceptScore W2496645360C71039073 @default.
- W2496645360 hasConceptScore W2496645360C82706917 @default.
- W2496645360 hasConceptScore W2496645360C85725439 @default.
- W2496645360 hasConceptScore W2496645360C95974651 @default.
- W2496645360 hasLocation W24966453601 @default.
- W2496645360 hasOpenAccess W2496645360 @default.
- W2496645360 hasPrimaryLocation W24966453601 @default.
- W2496645360 hasRelatedWork W1543488641 @default.
- W2496645360 hasRelatedWork W1566289674 @default.
- W2496645360 hasRelatedWork W1670792689 @default.
- W2496645360 hasRelatedWork W1680410685 @default.
- W2496645360 hasRelatedWork W1791867220 @default.
- W2496645360 hasRelatedWork W1969066957 @default.
- W2496645360 hasRelatedWork W1981901041 @default.
- W2496645360 hasRelatedWork W1997060425 @default.
- W2496645360 hasRelatedWork W2009541276 @default.
- W2496645360 hasRelatedWork W2024373100 @default.
- W2496645360 hasRelatedWork W2036754195 @default.
- W2496645360 hasRelatedWork W2048271889 @default.
- W2496645360 hasRelatedWork W2049893162 @default.
- W2496645360 hasRelatedWork W2069651625 @default.
- W2496645360 hasRelatedWork W2150108493 @default.
- W2496645360 hasRelatedWork W2164615276 @default.
- W2496645360 hasRelatedWork W2167242048 @default.
- W2496645360 hasRelatedWork W2171739448 @default.
- W2496645360 hasRelatedWork W2739365155 @default.
- W2496645360 hasRelatedWork W2187748523 @default.
- W2496645360 isParatext "false" @default.
- W2496645360 isRetracted "false" @default.
- W2496645360 magId "2496645360" @default.
- W2496645360 workType "book-chapter" @default.