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- W2496898862 abstract "A KrF excimer laser would be useful in micro· processing. For this application the laser spectral linewidth is narrowed to avoid chromatic aberration in the lens. Injection-locked lasers were applied to the early experiments,1 but they have disadvantages in handling and maintenance and the generation of speckle due to their high spatial coherence. Recently, single resonator type, narrow linewidth excimer lasers were developed2-4 and applied to microprocessing." @default.
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- W2496898862 date "1989-04-24" @default.
- W2496898862 modified "2023-09-26" @default.
- W2496898862 title "Narrow linewidth KrF excimer laser" @default.
- W2496898862 hasPublicationYear "1989" @default.
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