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- W2497424354 endingPage "0916002" @default.
- W2497424354 startingPage "0916002" @default.
- W2497424354 abstract "As one of the critical target of lithographic lens, pupil non-balance is modulated by many factors. It is necessary to distinguish the respective contribution of those factors. In this paper, a method is introduced to calibrate pupil balance by removing telecentriciy, and a comparison is made with another approach based on finding centroid. A user defined program, which is written in Matlab with the function of manipulating Code V and LightTools data, is consequently made up to implement the above technique and calculate the real position of pupil intensity in angular plane without telecentircity. Beside, a series of simulation on an optimally designed lithographic lens under off-axis illumination is given to show the verification. It is revealed that this method is functional in calibrating pupil non-balance with a high level of implement efficiency." @default.
- W2497424354 created "2016-08-23" @default.
- W2497424354 creator A5003461093 @default.
- W2497424354 creator A5037130213 @default.
- W2497424354 creator A5067496232 @default.
- W2497424354 creator A5088861439 @default.
- W2497424354 date "2014-01-01" @default.
- W2497424354 modified "2023-09-27" @default.
- W2497424354 title "Pupil Non-Balance Calibration for Lithographic Lens" @default.
- W2497424354 doi "https://doi.org/10.3788/cjl201441.0916002" @default.
- W2497424354 hasPublicationYear "2014" @default.
- W2497424354 type Work @default.
- W2497424354 sameAs 2497424354 @default.
- W2497424354 citedByCount "0" @default.
- W2497424354 crossrefType "journal-article" @default.
- W2497424354 hasAuthorship W2497424354A5003461093 @default.
- W2497424354 hasAuthorship W2497424354A5037130213 @default.
- W2497424354 hasAuthorship W2497424354A5067496232 @default.
- W2497424354 hasAuthorship W2497424354A5088861439 @default.
- W2497424354 hasConcept C119767625 @default.
- W2497424354 hasConcept C120665830 @default.
- W2497424354 hasConcept C121332964 @default.
- W2497424354 hasConcept C15336307 @default.
- W2497424354 hasConcept C165838908 @default.
- W2497424354 hasConcept C168031717 @default.
- W2497424354 hasConcept C204223013 @default.
- W2497424354 hasConcept C2777394604 @default.
- W2497424354 hasConcept C41008148 @default.
- W2497424354 hasConcept C62520636 @default.
- W2497424354 hasConcept C71924100 @default.
- W2497424354 hasConcept C99508421 @default.
- W2497424354 hasConceptScore W2497424354C119767625 @default.
- W2497424354 hasConceptScore W2497424354C120665830 @default.
- W2497424354 hasConceptScore W2497424354C121332964 @default.
- W2497424354 hasConceptScore W2497424354C15336307 @default.
- W2497424354 hasConceptScore W2497424354C165838908 @default.
- W2497424354 hasConceptScore W2497424354C168031717 @default.
- W2497424354 hasConceptScore W2497424354C204223013 @default.
- W2497424354 hasConceptScore W2497424354C2777394604 @default.
- W2497424354 hasConceptScore W2497424354C41008148 @default.
- W2497424354 hasConceptScore W2497424354C62520636 @default.
- W2497424354 hasConceptScore W2497424354C71924100 @default.
- W2497424354 hasConceptScore W2497424354C99508421 @default.
- W2497424354 hasIssue "9" @default.
- W2497424354 hasLocation W24974243541 @default.
- W2497424354 hasOpenAccess W2497424354 @default.
- W2497424354 hasPrimaryLocation W24974243541 @default.
- W2497424354 hasRelatedWork W2011020017 @default.
- W2497424354 hasRelatedWork W2021042472 @default.
- W2497424354 hasRelatedWork W2026059381 @default.
- W2497424354 hasRelatedWork W2074109741 @default.
- W2497424354 hasRelatedWork W2075664069 @default.
- W2497424354 hasRelatedWork W2151700929 @default.
- W2497424354 hasRelatedWork W2410608212 @default.
- W2497424354 hasRelatedWork W2414735499 @default.
- W2497424354 hasRelatedWork W2419552001 @default.
- W2497424354 hasRelatedWork W942427343 @default.
- W2497424354 hasVolume "41" @default.
- W2497424354 isParatext "false" @default.
- W2497424354 isRetracted "false" @default.
- W2497424354 magId "2497424354" @default.
- W2497424354 workType "article" @default.