Matches in SemOpenAlex for { <https://semopenalex.org/work/W2502862022> ?p ?o ?g. }
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- W2502862022 endingPage "125" @default.
- W2502862022 startingPage "110" @default.
- W2502862022 abstract "In order to clarify the effects of acid diffusion on lithographic performance, the acid diffusion behavior in chemically amplified positive KrF resists was studied. The resists consisted of tertbutoxycarbonyl (t-BOC) protected polyhydroxystyrene and a benzenesulfonic acid derivative as a photoacid generator (PAG). Acid diffusion coefficient and diffusion length were obtained using Fick's diffusion law by analyzing the amount of generated acid and ion conductivity of a resist film. As a result, it was confirmed that the acid diffusion is ruled by only one mechanism, and two diffusion paths, which correspond to the remaining solvent in the resist film and hydrophilic OH sites in the base resin, existed. Moreover, the acid diffusion length was decreased by increasing photoacid bulkiness. Furthermore, it was found that additional base component not only quenched photo-generated acid but also suppressed the acid diffusion. Based on the experimental analysis, the acid diffusion behavior in the resist film was clarified and the relationship between acid diffusion and resist performance was obtained." @default.
- W2502862022 created "2016-08-23" @default.
- W2502862022 creator A5020270828 @default.
- W2502862022 creator A5053036229 @default.
- W2502862022 creator A5068407046 @default.
- W2502862022 creator A5071550410 @default.
- W2502862022 creator A5081290321 @default.
- W2502862022 creator A5086379728 @default.
- W2502862022 date "1998-09-01" @default.
- W2502862022 modified "2023-09-25" @default.
- W2502862022 title "Photoacid Diffusion in Chemically Amplified DUV Resists" @default.
- W2502862022 doi "https://doi.org/10.1021/bk-1998-0706.ch009" @default.
- W2502862022 hasPublicationYear "1998" @default.
- W2502862022 type Work @default.
- W2502862022 sameAs 2502862022 @default.
- W2502862022 citedByCount "3" @default.
- W2502862022 countsByYear W25028620222014 @default.
- W2502862022 countsByYear W25028620222018 @default.
- W2502862022 crossrefType "book-chapter" @default.
- W2502862022 hasAuthorship W2502862022A5020270828 @default.
- W2502862022 hasAuthorship W2502862022A5053036229 @default.
- W2502862022 hasAuthorship W2502862022A5068407046 @default.
- W2502862022 hasAuthorship W2502862022A5071550410 @default.
- W2502862022 hasAuthorship W2502862022A5081290321 @default.
- W2502862022 hasAuthorship W2502862022A5086379728 @default.
- W2502862022 hasConcept C113196181 @default.
- W2502862022 hasConcept C121332964 @default.
- W2502862022 hasConcept C127413603 @default.
- W2502862022 hasConcept C178790620 @default.
- W2502862022 hasConcept C185592680 @default.
- W2502862022 hasConcept C188027245 @default.
- W2502862022 hasConcept C192562407 @default.
- W2502862022 hasConcept C2779227376 @default.
- W2502862022 hasConcept C2780471494 @default.
- W2502862022 hasConcept C42360764 @default.
- W2502862022 hasConcept C53524968 @default.
- W2502862022 hasConcept C69357855 @default.
- W2502862022 hasConcept C97355855 @default.
- W2502862022 hasConceptScore W2502862022C113196181 @default.
- W2502862022 hasConceptScore W2502862022C121332964 @default.
- W2502862022 hasConceptScore W2502862022C127413603 @default.
- W2502862022 hasConceptScore W2502862022C178790620 @default.
- W2502862022 hasConceptScore W2502862022C185592680 @default.
- W2502862022 hasConceptScore W2502862022C188027245 @default.
- W2502862022 hasConceptScore W2502862022C192562407 @default.
- W2502862022 hasConceptScore W2502862022C2779227376 @default.
- W2502862022 hasConceptScore W2502862022C2780471494 @default.
- W2502862022 hasConceptScore W2502862022C42360764 @default.
- W2502862022 hasConceptScore W2502862022C53524968 @default.
- W2502862022 hasConceptScore W2502862022C69357855 @default.
- W2502862022 hasConceptScore W2502862022C97355855 @default.
- W2502862022 hasLocation W25028620221 @default.
- W2502862022 hasOpenAccess W2502862022 @default.
- W2502862022 hasPrimaryLocation W25028620221 @default.
- W2502862022 hasRelatedWork W1973009192 @default.
- W2502862022 hasRelatedWork W2053426436 @default.
- W2502862022 hasRelatedWork W2075883970 @default.
- W2502862022 hasRelatedWork W2088899554 @default.
- W2502862022 hasRelatedWork W2095155031 @default.
- W2502862022 hasRelatedWork W2481264418 @default.
- W2502862022 hasRelatedWork W2502862022 @default.
- W2502862022 hasRelatedWork W2748952813 @default.
- W2502862022 hasRelatedWork W2899084033 @default.
- W2502862022 hasRelatedWork W2028342082 @default.
- W2502862022 isParatext "false" @default.
- W2502862022 isRetracted "false" @default.
- W2502862022 magId "2502862022" @default.
- W2502862022 workType "book-chapter" @default.