FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2503166239> ?p ?o ?g. }

• W2503166239 abstract "Theuseofultraviolet(UV)andvacuumultraviolet(VUV)photonsgeneratedfromlow pressureHglampsandexcimerlamps,respectively,toenhancethegrowthofultrathin dielectricsfilms on SiGestrainedlayersand on Siattemperaturesbelow550°Cis describedinthispaper. Thethickness,structure(composition)andelectricalproperties ofthe grown oxide layers were investigated by ellipsometry, Raman and electron spectroscopy, scanning and transmission electron microscopy, Rutherford backscattering, Fourier-transformIRspectroscopy,capacitance-voltageandcurrent­ voltagemeasurementsinordertocharacterisetheoxidationprocess. TheuseoftheUV and VUV radiationduring the oxidationresultedin significantenhancementsofthe growthratewhencomparedwiththermaloxidation,especiallyforthenovelexcimer lamp sources, which are more powerfullight sources than Hg lamps. Using this technique,highquality,stoichiometricSi02layersweregrownonSiorSicappedSiGe strainedlayers,withoutanymeasurablerelaxationofthestrainedsubstrate. Neweffects such as the formation during the UV-assisted oxidation of SiGe samples of nanocrystalline Ge particles inside the grown oxide layer which exhibit visible photoluminescenceandstresseffectsinducedbytheoxidationprocessarealsopresented." @default.
• W2503166239 created "2016-08-23" @default.
• W2503166239 creator A5058539510 @default.
• W2503166239 creator A5081369968 @default.
• W2503166239 date "1998-01-01" @default.
• W2503166239 modified "2023-09-27" @default.
• W2503166239 title "CHALLENGES IN THE OXIDATION OF STRAINED SiGe LAYERS" @default.
• W2503166239 cites W1964778743 @default.
• W2503166239 cites W1973694208 @default.
• W2503166239 cites W1984096831 @default.
• W2503166239 cites W1990357839 @default.
• W2503166239 cites W1990494600 @default.
• W2503166239 cites W1997669824 @default.
• W2503166239 cites W2003537914 @default.
• W2503166239 cites W2006847410 @default.
• W2503166239 cites W2008024441 @default.
• W2503166239 cites W2013653450 @default.
• W2503166239 cites W2028419595 @default.
• W2503166239 cites W2029936679 @default.
• W2503166239 cites W2036237162 @default.
• W2503166239 cites W2036621518 @default.
• W2503166239 cites W2038869843 @default.
• W2503166239 cites W2051299351 @default.
• W2503166239 cites W2059806062 @default.
• W2503166239 cites W2060090703 @default.
• W2503166239 cites W2062480891 @default.
• W2503166239 cites W2064037762 @default.
• W2503166239 cites W2067859946 @default.
• W2503166239 cites W2069389596 @default.
• W2503166239 cites W2087680492 @default.
• W2503166239 cites W2093389918 @default.
• W2503166239 cites W2093914900 @default.
• W2503166239 cites W2129185990 @default.
• W2503166239 cites W371109300 @default.
• W2503166239 cites W632135146 @default.
• W2503166239 hasPublicationYear "1998" @default.
• W2503166239 type Work @default.
• W2503166239 sameAs 2503166239 @default.
• W2503166239 citedByCount "0" @default.
• W2503166239 crossrefType "journal-article" @default.
• W2503166239 hasAuthorship W2503166239A5058539510 @default.
• W2503166239 hasAuthorship W2503166239A5081369968 @default.
• W2503166239 hasConcept C113196181 @default.
• W2503166239 hasConcept C120665830 @default.
• W2503166239 hasConcept C121332964 @default.
• W2503166239 hasConcept C140676511 @default.
• W2503166239 hasConcept C146088050 @default.
• W2503166239 hasConcept C159985019 @default.
• W2503166239 hasConcept C171250308 @default.
• W2503166239 hasConcept C18293161 @default.
• W2503166239 hasConcept C185592680 @default.
• W2503166239 hasConcept C19067145 @default.
• W2503166239 hasConcept C191897082 @default.
• W2503166239 hasConcept C192562407 @default.
• W2503166239 hasConcept C26771246 @default.
• W2503166239 hasConcept C2779227376 @default.
• W2503166239 hasConcept C2779851234 @default.
• W2503166239 hasConcept C32891209 @default.
• W2503166239 hasConcept C40003534 @default.
• W2503166239 hasConcept C43617362 @default.
• W2503166239 hasConcept C49040817 @default.
• W2503166239 hasConcept C62520636 @default.
• W2503166239 hasConceptScore W2503166239C113196181 @default.
• W2503166239 hasConceptScore W2503166239C120665830 @default.
• W2503166239 hasConceptScore W2503166239C121332964 @default.
• W2503166239 hasConceptScore W2503166239C140676511 @default.
• W2503166239 hasConceptScore W2503166239C146088050 @default.
• W2503166239 hasConceptScore W2503166239C159985019 @default.
• W2503166239 hasConceptScore W2503166239C171250308 @default.
• W2503166239 hasConceptScore W2503166239C18293161 @default.
• W2503166239 hasConceptScore W2503166239C185592680 @default.
• W2503166239 hasConceptScore W2503166239C19067145 @default.
• W2503166239 hasConceptScore W2503166239C191897082 @default.
• W2503166239 hasConceptScore W2503166239C192562407 @default.
• W2503166239 hasConceptScore W2503166239C26771246 @default.
• W2503166239 hasConceptScore W2503166239C2779227376 @default.
• W2503166239 hasConceptScore W2503166239C2779851234 @default.
• W2503166239 hasConceptScore W2503166239C32891209 @default.
• W2503166239 hasConceptScore W2503166239C40003534 @default.
• W2503166239 hasConceptScore W2503166239C43617362 @default.
• W2503166239 hasConceptScore W2503166239C49040817 @default.
• W2503166239 hasConceptScore W2503166239C62520636 @default.
• W2503166239 hasLocation W25031662391 @default.
• W2503166239 hasOpenAccess W2503166239 @default.
• W2503166239 hasPrimaryLocation W25031662391 @default.
• W2503166239 hasRelatedWork W1537698530 @default.
• W2503166239 hasRelatedWork W1543323420 @default.
• W2503166239 hasRelatedWork W1613932323 @default.
• W2503166239 hasRelatedWork W1973671778 @default.
• W2503166239 hasRelatedWork W1974005091 @default.
• W2503166239 hasRelatedWork W1988803969 @default.
• W2503166239 hasRelatedWork W2012381520 @default.
• W2503166239 hasRelatedWork W2046857521 @default.
• W2503166239 hasRelatedWork W2052633935 @default.
• W2503166239 hasRelatedWork W2072569794 @default.
• W2503166239 hasRelatedWork W2074159850 @default.
• W2503166239 hasRelatedWork W2076259834 @default.
• W2503166239 hasRelatedWork W2076309302 @default.
• W2503166239 hasRelatedWork W2082739505 @default.
• W2503166239 hasRelatedWork W2098271275 @default.

• next