Matches in SemOpenAlex for { <https://semopenalex.org/work/W2507345448> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2507345448 abstract "We report a hermetic thin film packaging on aluminum nitride AlN RF MEMS platforms that is entirely CMOS compatible and wafer level executed. The process flow, including release of multiple free-moving body and encapsulation of the functional structures are demonstrated using 8 wafer level thin film micromachining technology. The encapsulated devices are reported to survive post CMOS assembly processes such as wafer level dicing and flip-chip bonding. Both fabrication outcome and measurement results indicate high possibility in cost effective and footprint reduction in MEMS integration technology." @default.
- W2507345448 created "2016-09-16" @default.
- W2507345448 creator A5009428572 @default.
- W2507345448 creator A5030129925 @default.
- W2507345448 creator A5063514154 @default.
- W2507345448 creator A5075256715 @default.
- W2507345448 creator A5085352734 @default.
- W2507345448 date "2016-05-01" @default.
- W2507345448 modified "2023-10-16" @default.
- W2507345448 title "Hermetic Wafer Level Thin Film Packaging for MEMS" @default.
- W2507345448 cites W2011052839 @default.
- W2507345448 cites W2057475186 @default.
- W2507345448 cites W2074365264 @default.
- W2507345448 cites W2095290962 @default.
- W2507345448 doi "https://doi.org/10.1109/ectc.2016.317" @default.
- W2507345448 hasPublicationYear "2016" @default.
- W2507345448 type Work @default.
- W2507345448 sameAs 2507345448 @default.
- W2507345448 citedByCount "1" @default.
- W2507345448 countsByYear W25073454482016 @default.
- W2507345448 crossrefType "proceedings-article" @default.
- W2507345448 hasAuthorship W2507345448A5009428572 @default.
- W2507345448 hasAuthorship W2507345448A5030129925 @default.
- W2507345448 hasAuthorship W2507345448A5063514154 @default.
- W2507345448 hasAuthorship W2507345448A5075256715 @default.
- W2507345448 hasAuthorship W2507345448A5085352734 @default.
- W2507345448 hasConcept C126355924 @default.
- W2507345448 hasConcept C127413603 @default.
- W2507345448 hasConcept C132943942 @default.
- W2507345448 hasConcept C136525101 @default.
- W2507345448 hasConcept C142724271 @default.
- W2507345448 hasConcept C145667562 @default.
- W2507345448 hasConcept C151730666 @default.
- W2507345448 hasConcept C160671074 @default.
- W2507345448 hasConcept C165013422 @default.
- W2507345448 hasConcept C171250308 @default.
- W2507345448 hasConcept C192562407 @default.
- W2507345448 hasConcept C204787440 @default.
- W2507345448 hasConcept C24326235 @default.
- W2507345448 hasConcept C2778638305 @default.
- W2507345448 hasConcept C2779133538 @default.
- W2507345448 hasConcept C2779227376 @default.
- W2507345448 hasConcept C2780288131 @default.
- W2507345448 hasConcept C37977207 @default.
- W2507345448 hasConcept C44445679 @default.
- W2507345448 hasConcept C46362747 @default.
- W2507345448 hasConcept C49040817 @default.
- W2507345448 hasConcept C68928338 @default.
- W2507345448 hasConcept C71924100 @default.
- W2507345448 hasConcept C79072407 @default.
- W2507345448 hasConcept C8002213 @default.
- W2507345448 hasConcept C86803240 @default.
- W2507345448 hasConceptScore W2507345448C126355924 @default.
- W2507345448 hasConceptScore W2507345448C127413603 @default.
- W2507345448 hasConceptScore W2507345448C132943942 @default.
- W2507345448 hasConceptScore W2507345448C136525101 @default.
- W2507345448 hasConceptScore W2507345448C142724271 @default.
- W2507345448 hasConceptScore W2507345448C145667562 @default.
- W2507345448 hasConceptScore W2507345448C151730666 @default.
- W2507345448 hasConceptScore W2507345448C160671074 @default.
- W2507345448 hasConceptScore W2507345448C165013422 @default.
- W2507345448 hasConceptScore W2507345448C171250308 @default.
- W2507345448 hasConceptScore W2507345448C192562407 @default.
- W2507345448 hasConceptScore W2507345448C204787440 @default.
- W2507345448 hasConceptScore W2507345448C24326235 @default.
- W2507345448 hasConceptScore W2507345448C2778638305 @default.
- W2507345448 hasConceptScore W2507345448C2779133538 @default.
- W2507345448 hasConceptScore W2507345448C2779227376 @default.
- W2507345448 hasConceptScore W2507345448C2780288131 @default.
- W2507345448 hasConceptScore W2507345448C37977207 @default.
- W2507345448 hasConceptScore W2507345448C44445679 @default.
- W2507345448 hasConceptScore W2507345448C46362747 @default.
- W2507345448 hasConceptScore W2507345448C49040817 @default.
- W2507345448 hasConceptScore W2507345448C68928338 @default.
- W2507345448 hasConceptScore W2507345448C71924100 @default.
- W2507345448 hasConceptScore W2507345448C79072407 @default.
- W2507345448 hasConceptScore W2507345448C8002213 @default.
- W2507345448 hasConceptScore W2507345448C86803240 @default.
- W2507345448 hasLocation W25073454481 @default.
- W2507345448 hasOpenAccess W2507345448 @default.
- W2507345448 hasPrimaryLocation W25073454481 @default.
- W2507345448 hasRelatedWork W1969570385 @default.
- W2507345448 hasRelatedWork W2069753296 @default.
- W2507345448 hasRelatedWork W2075893297 @default.
- W2507345448 hasRelatedWork W2082419378 @default.
- W2507345448 hasRelatedWork W2094236328 @default.
- W2507345448 hasRelatedWork W2100299767 @default.
- W2507345448 hasRelatedWork W2168718532 @default.
- W2507345448 hasRelatedWork W2467328781 @default.
- W2507345448 hasRelatedWork W2507345448 @default.
- W2507345448 hasRelatedWork W2540312267 @default.
- W2507345448 isParatext "false" @default.
- W2507345448 isRetracted "false" @default.
- W2507345448 magId "2507345448" @default.
- W2507345448 workType "article" @default.