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- W2508934586 abstract "There is a temperature drift of an accelerometer attributed to the temperature variation, which would adversely influencethe output performance. In this paper, a quantitative analysis of the temperature effect and the temperature compensationof a MOEMS accelerometer, which is composed of a grating interferometric cavity and a micromachined sensing chip,are proposed. A finite-element-method (FEM) approach is applied in this work to simulate the deformation of thesensing chip of the MOEMS accelerometer at different temperature from -20°C to 70°C. The deformation results in thevariation of the distance between the grating and the sensing chip of the MOEMS accelerometer, modulating the outputintensities finally. A static temperature model is set up to describe the temperature characteristics of the accelerometerthrough the simulation results and the temperature compensation is put forward based on the temperature model, whichcan improve the output performance of the accelerometer. This model is permitted to estimate the temperature effect ofthis type accelerometer, which contains a micromachined sensing chip. Comparison of the output intensities with andwithout temperature compensation indicates that the temperature compensation can improve the stability of the outputintensities of the MOEMS accelerometer based on a grating interferometric cavity." @default.
- W2508934586 created "2016-09-16" @default.
- W2508934586 creator A5009725293 @default.
- W2508934586 creator A5027226262 @default.
- W2508934586 creator A5047524256 @default.
- W2508934586 creator A5066978921 @default.
- W2508934586 creator A5080385387 @default.
- W2508934586 creator A5085655988 @default.
- W2508934586 date "2016-08-28" @default.
- W2508934586 modified "2023-09-27" @default.
- W2508934586 title "The analysis of temperature effect and temperature compensation of MOEMS accelerometer based on a grating interferometric cavity" @default.
- W2508934586 cites W1562559884 @default.
- W2508934586 cites W1972674454 @default.
- W2508934586 cites W2000607003 @default.
- W2508934586 cites W2008833214 @default.
- W2508934586 cites W2009888974 @default.
- W2508934586 cites W2033405633 @default.
- W2508934586 cites W2061846512 @default.
- W2508934586 cites W2071286792 @default.
- W2508934586 cites W2336878958 @default.
- W2508934586 cites W2563505887 @default.
- W2508934586 cites W2573978999 @default.
- W2508934586 doi "https://doi.org/10.1117/12.2236584" @default.
- W2508934586 hasPublicationYear "2016" @default.
- W2508934586 type Work @default.
- W2508934586 sameAs 2508934586 @default.
- W2508934586 citedByCount "2" @default.
- W2508934586 countsByYear W25089345862018 @default.
- W2508934586 crossrefType "proceedings-article" @default.
- W2508934586 hasAuthorship W2508934586A5009725293 @default.
- W2508934586 hasAuthorship W2508934586A5027226262 @default.
- W2508934586 hasAuthorship W2508934586A5047524256 @default.
- W2508934586 hasAuthorship W2508934586A5066978921 @default.
- W2508934586 hasAuthorship W2508934586A5080385387 @default.
- W2508934586 hasAuthorship W2508934586A5085655988 @default.
- W2508934586 hasConcept C11171543 @default.
- W2508934586 hasConcept C120665830 @default.
- W2508934586 hasConcept C121332964 @default.
- W2508934586 hasConcept C15744967 @default.
- W2508934586 hasConcept C165005293 @default.
- W2508934586 hasConcept C166689943 @default.
- W2508934586 hasConcept C192562407 @default.
- W2508934586 hasConcept C24890656 @default.
- W2508934586 hasConcept C2777813233 @default.
- W2508934586 hasConcept C2780023022 @default.
- W2508934586 hasConcept C41008148 @default.
- W2508934586 hasConcept C62520636 @default.
- W2508934586 hasConcept C72293138 @default.
- W2508934586 hasConcept C76155785 @default.
- W2508934586 hasConcept C89805583 @default.
- W2508934586 hasConceptScore W2508934586C11171543 @default.
- W2508934586 hasConceptScore W2508934586C120665830 @default.
- W2508934586 hasConceptScore W2508934586C121332964 @default.
- W2508934586 hasConceptScore W2508934586C15744967 @default.
- W2508934586 hasConceptScore W2508934586C165005293 @default.
- W2508934586 hasConceptScore W2508934586C166689943 @default.
- W2508934586 hasConceptScore W2508934586C192562407 @default.
- W2508934586 hasConceptScore W2508934586C24890656 @default.
- W2508934586 hasConceptScore W2508934586C2777813233 @default.
- W2508934586 hasConceptScore W2508934586C2780023022 @default.
- W2508934586 hasConceptScore W2508934586C41008148 @default.
- W2508934586 hasConceptScore W2508934586C62520636 @default.
- W2508934586 hasConceptScore W2508934586C72293138 @default.
- W2508934586 hasConceptScore W2508934586C76155785 @default.
- W2508934586 hasConceptScore W2508934586C89805583 @default.
- W2508934586 hasLocation W25089345861 @default.
- W2508934586 hasOpenAccess W2508934586 @default.
- W2508934586 hasPrimaryLocation W25089345861 @default.
- W2508934586 hasRelatedWork W2095328227 @default.
- W2508934586 hasRelatedWork W2217568447 @default.
- W2508934586 hasRelatedWork W2235787825 @default.
- W2508934586 hasRelatedWork W2362522910 @default.
- W2508934586 hasRelatedWork W2386097818 @default.
- W2508934586 hasRelatedWork W2514500143 @default.
- W2508934586 hasRelatedWork W2838556372 @default.
- W2508934586 hasRelatedWork W2948021445 @default.
- W2508934586 hasRelatedWork W2967625301 @default.
- W2508934586 hasRelatedWork W2984799061 @default.
- W2508934586 hasRelatedWork W2990853995 @default.
- W2508934586 hasRelatedWork W3010152455 @default.
- W2508934586 hasRelatedWork W3124300278 @default.
- W2508934586 hasRelatedWork W3133499120 @default.
- W2508934586 hasRelatedWork W3138710082 @default.
- W2508934586 hasRelatedWork W3185161120 @default.
- W2508934586 hasRelatedWork W3206061906 @default.
- W2508934586 hasRelatedWork W3211676937 @default.
- W2508934586 hasRelatedWork W2877640208 @default.
- W2508934586 hasRelatedWork W3123027029 @default.
- W2508934586 isParatext "false" @default.
- W2508934586 isRetracted "false" @default.
- W2508934586 magId "2508934586" @default.
- W2508934586 workType "article" @default.