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- W2509554821 abstract "In this paper, a unique micro Pirani gauge is investigated for multi-function sensing. The microgauge, implemented in a silicon-on-insulator technology, was designed as a suspended microbridge. In order to be able to sense both temperature and pressure with a single implemented device, a special design consideration was taken. Moreover, concerning the pressure measurement, instead of exploiting the Pirani gauge principle in its steady state as done in a conventional way, the transient response of the gauge is exploited. As a result, the pressure sensitive range is remarkably extended beyond the atmosphere. The design of the device, the setup of experiments, and the measured results are given." @default.
- W2509554821 created "2016-09-16" @default.
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- W2509554821 date "2016-11-01" @default.
- W2509554821 modified "2023-09-22" @default.
- W2509554821 title "Investigating a Micro Pirani Gauge for Multi-Function Sensing" @default.
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- W2509554821 doi "https://doi.org/10.1109/jsen.2016.2604206" @default.
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