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- W2510130983 abstract "An ellipsometer is installed in an unloading chamber of in-line plasma CVD system to evaluate film thicknesses and refractive indices. The ellipsometer is a rotating-analyzer type, in which a λ/4 compensator is always positioned with the fast axis 45° setting a polarizer prism to a proper azimuth. The SiNx films on silicon substrates prepared by plasma CVD are automatically and successivley checked in the system." @default.
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- W2510130983 date "1982-01-01" @default.
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- W2510130983 doi "https://doi.org/10.3131/jvsj.25.106" @default.
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