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- W2511447652 abstract "Laser cleaning of micron and sub-micron particles from various substrates such as silicon wafers and glass has been an active area of research in laser processing [1]. Both understanding the fundamental physics of the light/particle/surface interaction and the development of successful cleaning protocols for industrial application have been drivers. It has been observed that directing the laser beam through a semi-transparent or transparent sample can give a higher laser cleaning efficiency for a given laser fluence than does front laser irradiation [2]. In this work we present new comparative experimental results of “front and back” laser cleaning of silica particles from silica and glass substrates. Also, a comparison is made of the optical damage that occurs at higher laser fluences, beyond the damage free laser cleaning limit, for both.Laser cleaning of micron and sub-micron particles from various substrates such as silicon wafers and glass has been an active area of research in laser processing [1]. Both understanding the fundamental physics of the light/particle/surface interaction and the development of successful cleaning protocols for industrial application have been drivers. It has been observed that directing the laser beam through a semi-transparent or transparent sample can give a higher laser cleaning efficiency for a given laser fluence than does front laser irradiation [2]. In this work we present new comparative experimental results of “front and back” laser cleaning of silica particles from silica and glass substrates. Also, a comparison is made of the optical damage that occurs at higher laser fluences, beyond the damage free laser cleaning limit, for both." @default.
- W2511447652 created "2016-09-16" @default.
- W2511447652 creator A5033648151 @default.
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- W2511447652 date "2006-01-01" @default.
- W2511447652 modified "2023-09-25" @default.
- W2511447652 title "Comparison of front and back laser irradiation in laser cleaning of silica particles from silica glass" @default.
- W2511447652 doi "https://doi.org/10.2351/1.5056947" @default.
- W2511447652 hasPublicationYear "2006" @default.
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