Matches in SemOpenAlex for { <https://semopenalex.org/work/W2512487029> ?p ?o ?g. }
Showing items 1 to 79 of
79
with 100 items per page.
- W2512487029 endingPage "70" @default.
- W2512487029 startingPage "66" @default.
- W2512487029 abstract "Recent work in this laboratory has suggested that for semiconductors, control of the chemical state at a surface can influence important properties of the underlying bulk. For example, the annihilation probability affects the average interstitial concentration in the bulk, that in turn influences dopant diffusion and activation in post-implant annealing for ultrashallow junction formation. Here, an experimental method employing isotopic labeling techniques is described that can measure the interstitial annihilation probability." @default.
- W2512487029 created "2016-09-16" @default.
- W2512487029 creator A5005131667 @default.
- W2512487029 creator A5075860726 @default.
- W2512487029 date "2004-10-28" @default.
- W2512487029 modified "2023-09-23" @default.
- W2512487029 title "Influence of surface chemistry on ultrashallow junction formation" @default.
- W2512487029 hasPublicationYear "2004" @default.
- W2512487029 type Work @default.
- W2512487029 sameAs 2512487029 @default.
- W2512487029 citedByCount "0" @default.
- W2512487029 crossrefType "journal-article" @default.
- W2512487029 hasAuthorship W2512487029A5005131667 @default.
- W2512487029 hasAuthorship W2512487029A5075860726 @default.
- W2512487029 hasConcept C108225325 @default.
- W2512487029 hasConcept C121332964 @default.
- W2512487029 hasConcept C159467904 @default.
- W2512487029 hasConcept C171250308 @default.
- W2512487029 hasConcept C178790620 @default.
- W2512487029 hasConcept C185544564 @default.
- W2512487029 hasConcept C185592680 @default.
- W2512487029 hasConcept C191897082 @default.
- W2512487029 hasConcept C191952053 @default.
- W2512487029 hasConcept C192562407 @default.
- W2512487029 hasConcept C201941533 @default.
- W2512487029 hasConcept C2777855556 @default.
- W2512487029 hasConcept C49040817 @default.
- W2512487029 hasConcept C544956773 @default.
- W2512487029 hasConcept C57863236 @default.
- W2512487029 hasConcept C69357855 @default.
- W2512487029 hasConcept C71987851 @default.
- W2512487029 hasConcept C97355855 @default.
- W2512487029 hasConceptScore W2512487029C108225325 @default.
- W2512487029 hasConceptScore W2512487029C121332964 @default.
- W2512487029 hasConceptScore W2512487029C159467904 @default.
- W2512487029 hasConceptScore W2512487029C171250308 @default.
- W2512487029 hasConceptScore W2512487029C178790620 @default.
- W2512487029 hasConceptScore W2512487029C185544564 @default.
- W2512487029 hasConceptScore W2512487029C185592680 @default.
- W2512487029 hasConceptScore W2512487029C191897082 @default.
- W2512487029 hasConceptScore W2512487029C191952053 @default.
- W2512487029 hasConceptScore W2512487029C192562407 @default.
- W2512487029 hasConceptScore W2512487029C201941533 @default.
- W2512487029 hasConceptScore W2512487029C2777855556 @default.
- W2512487029 hasConceptScore W2512487029C49040817 @default.
- W2512487029 hasConceptScore W2512487029C544956773 @default.
- W2512487029 hasConceptScore W2512487029C57863236 @default.
- W2512487029 hasConceptScore W2512487029C69357855 @default.
- W2512487029 hasConceptScore W2512487029C71987851 @default.
- W2512487029 hasConceptScore W2512487029C97355855 @default.
- W2512487029 hasLocation W25124870291 @default.
- W2512487029 hasOpenAccess W2512487029 @default.
- W2512487029 hasPrimaryLocation W25124870291 @default.
- W2512487029 hasRelatedWork W1590549222 @default.
- W2512487029 hasRelatedWork W1986275797 @default.
- W2512487029 hasRelatedWork W1987457221 @default.
- W2512487029 hasRelatedWork W1991824621 @default.
- W2512487029 hasRelatedWork W1996407579 @default.
- W2512487029 hasRelatedWork W1999848689 @default.
- W2512487029 hasRelatedWork W2026919367 @default.
- W2512487029 hasRelatedWork W2039188817 @default.
- W2512487029 hasRelatedWork W2051702870 @default.
- W2512487029 hasRelatedWork W2052972047 @default.
- W2512487029 hasRelatedWork W2060135676 @default.
- W2512487029 hasRelatedWork W2074544449 @default.
- W2512487029 hasRelatedWork W2107810710 @default.
- W2512487029 hasRelatedWork W2123715333 @default.
- W2512487029 hasRelatedWork W2139374890 @default.
- W2512487029 hasRelatedWork W2168497749 @default.
- W2512487029 hasRelatedWork W2329864622 @default.
- W2512487029 hasRelatedWork W2532873801 @default.
- W2512487029 hasRelatedWork W2540210186 @default.
- W2512487029 hasRelatedWork W2546988354 @default.
- W2512487029 isParatext "false" @default.
- W2512487029 isRetracted "false" @default.
- W2512487029 magId "2512487029" @default.
- W2512487029 workType "article" @default.