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- W2512589307 abstract "In the context of measurement technology, optical methods have a number of unique features. On the other hand the useris faced with serious challenges. One of the biggest challenges that currently attracts high attention in both the technicalas well as life sciences, relates to exceeding the physical limits of resolution. Nowadays people prefer to talk aboutsuper-resolution. However, this concept creates an often excessive expectation, since this way only the diffraction limitcan be achieved in many practical cases. Not to forget are those negative consequences that arise from the highinformation density in optical signals. The nature of light and its fascinating interaction with matter that makes our visualsense on the one hand the most valuable information carrier, often prevents on the other hand, the metrologically correctinterpretation of the results. Nevertheless, it can be proven by numerous examples that no alternative to the opticalprinciples exists. Because critical structures are getting smaller and functional surfaces are becoming increasinglycomplex, the wavelength of light provides the most flexible and traceable standard to cope with the challenges. But thepotential of optical methods, often seduced to an overload of the wish list or to unrealistic promises. Therefore, thispaper is dedicated to the tension between desire and reality in optical measuring techniques." @default.
- W2512589307 created "2016-09-16" @default.
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- W2512589307 date "2016-08-28" @default.
- W2512589307 modified "2023-09-23" @default.
- W2512589307 title "Optical metrology in the conflict between desire and reality" @default.
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- W2512589307 doi "https://doi.org/10.1117/12.2240661" @default.
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