Matches in SemOpenAlex for { <https://semopenalex.org/work/W2512756594> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W2512756594 endingPage "293" @default.
- W2512756594 startingPage "287" @default.
- W2512756594 abstract "Monolithic (TiBC, TiBN, SiNx) and double layered films (TiBC-SiNx, TiBN-SiNx) were deposited on Si wafers or WC-Co substrates at about 800°C from a hexamethyldisiloxane, titanium tetra-ethoxide or tri-ethoxy borate solution and their mixed solution by thermal plasma chemical vapor deposition. The films were characterized by thin film X-raydiffractmetry (XRD), X-ray photoelectron spectroscopy, scanning electron microscopy, EDS analysis and the cutting tests. XRD indicated that TiBC and TiBN phases were crystalline, but SiNx was amorphous. Thickness of under-layered TiBC or TiBN and over-layered SiNx in the double layered films was 0.5 and 2-4μm, respectively. The cutting tests for the double layered film deposited on WC-Co showed that the double layered TiBC-SiNx and TiBN-SiNx films possessed the good wear resistance comparable to or higher than the commercial TiN film deposited on WC-Co prepared by thermal CVD, in terms of crater and flank wear resistances." @default.
- W2512756594 created "2016-09-16" @default.
- W2512756594 creator A5023489169 @default.
- W2512756594 creator A5048385414 @default.
- W2512756594 creator A5010921671 @default.
- W2512756594 date "2007-01-01" @default.
- W2512756594 modified "2023-10-16" @default.
- W2512756594 title "Preparation and Wear Resistance of TiBC, TiBN, SiNX Single Layer Film and TiBC-SiNX and TiBN-SiNX Double Layer Film by Thermal Plasma CVD" @default.
- W2512756594 cites W1992601152 @default.
- W2512756594 cites W2003253845 @default.
- W2512756594 cites W2006381884 @default.
- W2512756594 cites W2013044332 @default.
- W2512756594 cites W2018507065 @default.
- W2512756594 cites W2021706579 @default.
- W2512756594 cites W2029523561 @default.
- W2512756594 cites W2060656144 @default.
- W2512756594 cites W2061834115 @default.
- W2512756594 cites W2079520932 @default.
- W2512756594 cites W2083485200 @default.
- W2512756594 cites W2083930845 @default.
- W2512756594 cites W2084412367 @default.
- W2512756594 cites W2146198063 @default.
- W2512756594 doi "https://doi.org/10.2497/jjspm.54.287" @default.
- W2512756594 hasPublicationYear "2007" @default.
- W2512756594 type Work @default.
- W2512756594 sameAs 2512756594 @default.
- W2512756594 citedByCount "4" @default.
- W2512756594 countsByYear W25127565942020 @default.
- W2512756594 crossrefType "journal-article" @default.
- W2512756594 hasAuthorship W2512756594A5010921671 @default.
- W2512756594 hasAuthorship W2512756594A5023489169 @default.
- W2512756594 hasAuthorship W2512756594A5048385414 @default.
- W2512756594 hasBestOaLocation W25127565941 @default.
- W2512756594 hasConcept C113196181 @default.
- W2512756594 hasConcept C127413603 @default.
- W2512756594 hasConcept C160671074 @default.
- W2512756594 hasConcept C171250308 @default.
- W2512756594 hasConcept C175708663 @default.
- W2512756594 hasConcept C185592680 @default.
- W2512756594 hasConcept C192562407 @default.
- W2512756594 hasConcept C38347018 @default.
- W2512756594 hasConcept C42360764 @default.
- W2512756594 hasConcept C43617362 @default.
- W2512756594 hasConcept C56052488 @default.
- W2512756594 hasConcept C57410435 @default.
- W2512756594 hasConcept C8010536 @default.
- W2512756594 hasConceptScore W2512756594C113196181 @default.
- W2512756594 hasConceptScore W2512756594C127413603 @default.
- W2512756594 hasConceptScore W2512756594C160671074 @default.
- W2512756594 hasConceptScore W2512756594C171250308 @default.
- W2512756594 hasConceptScore W2512756594C175708663 @default.
- W2512756594 hasConceptScore W2512756594C185592680 @default.
- W2512756594 hasConceptScore W2512756594C192562407 @default.
- W2512756594 hasConceptScore W2512756594C38347018 @default.
- W2512756594 hasConceptScore W2512756594C42360764 @default.
- W2512756594 hasConceptScore W2512756594C43617362 @default.
- W2512756594 hasConceptScore W2512756594C56052488 @default.
- W2512756594 hasConceptScore W2512756594C57410435 @default.
- W2512756594 hasConceptScore W2512756594C8010536 @default.
- W2512756594 hasIssue "4" @default.
- W2512756594 hasLocation W25127565941 @default.
- W2512756594 hasOpenAccess W2512756594 @default.
- W2512756594 hasPrimaryLocation W25127565941 @default.
- W2512756594 hasRelatedWork W2072183576 @default.
- W2512756594 hasRelatedWork W2091176159 @default.
- W2512756594 hasRelatedWork W2286863473 @default.
- W2512756594 hasRelatedWork W2380867052 @default.
- W2512756594 hasRelatedWork W2492233408 @default.
- W2512756594 hasRelatedWork W2538112308 @default.
- W2512756594 hasRelatedWork W2554884316 @default.
- W2512756594 hasRelatedWork W2561762656 @default.
- W2512756594 hasRelatedWork W3145503089 @default.
- W2512756594 hasRelatedWork W2584279877 @default.
- W2512756594 hasVolume "54" @default.
- W2512756594 isParatext "false" @default.
- W2512756594 isRetracted "false" @default.
- W2512756594 magId "2512756594" @default.
- W2512756594 workType "article" @default.