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- W2516110651 abstract "This paper presents a system that can be used for micro-hole measurement; the system comprises an optical fiber stylus that is 5 µm in diameter. The stylus deflects when it comes into contact with the measured surface; this deflection is measured optically. In this study, the design parameters of the optical system are determined using a ray-tracing method, and a prototype of the probing system is fabricated to verify ray-tracing simulation results; furthermore, the performance of the system is evaluated experimentally. The results show that the design parameters of this system can be determined using ray-tracing; the resolution of the measurement system using this shaft was approximately 3 nm, and the practicality of this system was confirmed by measuring the shape of a micro-hole 100 µm in diameter and 475 µm in depth." @default.
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- W2516110651 date "2016-08-11" @default.
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- W2516110651 title "Development of Touch Probing System Using a Fiber Stylus" @default.
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- W2516110651 doi "https://doi.org/10.3390/fib4030024" @default.
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