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- W2516202510 abstract "Removal by using laser irradiation was investigated in Poly-Vinyl Phenol (PVP). The laser irradiation in the water can improve the PVP stripping effect as compared with that of normal atmosphere irradiation. The surface laser damage threshold of Si wafer was 0.13 J/cm(2), and the PVP stripping threshold was 0.06 J/cm(2). The PVP stripping threshold decreased to approximately 50 % of the surface laser damage threshold. The PVP strips from the Si wafer just as shown in a positive-tone DNQ / novolak resist. However, removal efficiency decreased at a large irradiation beam diameter. The stripped area decreases at the beam diameter of 1.5mm or more. Irradiation with multiple laser beams with a small beam diameter could improve the PVP stripping rate with high efficiency." @default.
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- W2516202510 date "2016-01-01" @default.
- W2516202510 modified "2023-09-22" @default.
- W2516202510 title "Removal Technology of Poly-Vinyl Phenol Using Laser Irradiation" @default.
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- W2516202510 doi "https://doi.org/10.2494/photopolymer.29.633" @default.
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