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- W2516689939 abstract "A controllable and selective process for doping is essential for current CMOS technology, and with the advent of FinFETs, necessity for conformal doping has become inevitable. In this work, we demonstrate formation of novel phosphorus porphyrin self-assembled monolayers(SAMs) on silicon substrate to dope silicon with phosphorus (n-type doping). Detailed physical characterization of SAMs formed on silicon is done using contact angle, FTIR, UV-Vis, etc. The doping is confirmed using SIMS and four-probe measurement (sheet resistance). MISCAP devices, pn junction diodes using the above technique are fabricated and characterized using capacitance-voltage (CV) and current-voltage (IV) measurements. SAM layer is utilized for doping in 3D fin like structures." @default.
- W2516689939 created "2016-09-16" @default.
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- W2516689939 date "2016-06-01" @default.
- W2516689939 modified "2023-09-25" @default.
- W2516689939 title "Novel hydroxy-phenyl phosphorus porphyrin self-assembled monolayers for conformal n-type doping in Finfets" @default.
- W2516689939 cites W2028840494 @default.
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- W2516689939 doi "https://doi.org/10.1109/drc.2016.7548435" @default.
- W2516689939 hasPublicationYear "2016" @default.
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