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- W2517302629 endingPage "79" @default.
- W2517302629 startingPage "59" @default.
- W2517302629 abstract "In this chapter, we demonstrated the various functional nanomaterials and thin films as well as the corresponding semiconductor processing for metal and compound depositions by using the sputtering technologies. The corresponding growth mechanism are discussed in detail." @default.
- W2517302629 created "2016-09-16" @default.
- W2517302629 creator A5043174699 @default.
- W2517302629 date "2016-09-08" @default.
- W2517302629 modified "2023-10-17" @default.
- W2517302629 title "Nanostructures and Thin Films Deposited with Sputtering" @default.
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- W2517302629 doi "https://doi.org/10.1002/9783527696406.ch3" @default.
- W2517302629 hasPublicationYear "2016" @default.
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