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- W2517382285 startingPage "413" @default.
- W2517382285 abstract "The 17×17 parallel electron beam lithography system has been implemented and evaluated to clarify its system problems and to accelerate a 100×100 massive parallel electron beam direct draw system under development. This paper describes its system concept, an electron emitter driver circuit, its control system and an exposure result." @default.
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- W2517382285 date "2016-01-01" @default.
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- W2517382285 title "Development of a 17×17 Parallel Electron Beam Lithography System" @default.
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- W2517382285 doi "https://doi.org/10.1541/ieejsmas.136.413" @default.
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