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- W2517384524 abstract "This paper mainly focuses on solving the low yield problem for lateral phase change random access memory with a fully confined phase change material node. Improper over-etching and bad step-coverage of physical vapor deposition were the main reasons for the poor contact quality, which leads to the low yield problem. Process improvement was carried out to better control over-etching within 10 nm. Atomic layer deposition process was used to replace physical vapor deposition to guarantee good step coverage. Contrasting cross-sectional photos taken by scanning electron microscopy showed great improvement in contact quality. The atom layer deposition process was demonstrated to have good prospects in nano-contact for phase change memory application." @default.
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- W2517384524 date "2016-08-01" @default.
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- W2517384524 title "Investigation and solution of low yield problem for phase change memory with lateral fully-confined structure" @default.
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- W2517384524 doi "https://doi.org/10.1088/1674-4926/37/8/084005" @default.
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