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- W2518449035 abstract "The manufacturing of multilayer Laue (MLL) components for X-ray optics by physical vapor deposition (PVD) requireshigh precision and accuracy that presents a significant process control challenge. Currently, no process control systemprovides the accuracy, long-term stability and broad capability for adoption in the manufacturing of X-ray optics. In situatomic absorption spectroscopy is a promising process control solution, capable of monitoring the deposition rate andchemical composition of extremely thin metal silicide films during deposition and overcoming many limitations of thetraditional methods. A novel in situ PVD process control system for the manufacturing of high-precision thin films, based on combinedatomic absorption/emission spectrometry in the vicinity of the deposited substrate, is described. By monitoring theatomic concentration in the plasma region independently from the film growth on the deposited substrate, the methodallows deposition control of extremely thin films, compound thin films and complex multilayer structures. It providesdeposition rate and film composition measurements that can be further utilized for dynamic feedback process control.The system comprises a reconfigurable hardware module located outside the deposition chamber with hollow cathodelight sources and a fiber-optic-based frame installed inside the deposition chamber. Recent experimental results from insitu monitoring of Al and Si thin films deposited by DC and RF magnetron sputtering at a variety of plasma conditionsand monitoring configurations are presented. The results validate the operation of the system in the deposition ofcompound thin films and provide a path forward for use in manufacturing of X-Ray optics." @default.
- W2518449035 created "2016-09-16" @default.
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- W2518449035 date "2016-09-08" @default.
- W2518449035 modified "2023-09-23" @default.
- W2518449035 title "Fiber-optic based in situ atomic spectroscopy for manufacturing of x-ray optics" @default.
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- W2518449035 doi "https://doi.org/10.1117/12.2240406" @default.
- W2518449035 hasPublicationYear "2016" @default.
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