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- W2518483151 abstract "This paper demonstrates a variety of metrology methods for high selective silicon nitride etch in different process baths. Capability of measuring full matrix components is also presented. For the measurement of H 3 PO 4 and H 2 O, both NIR spectroscopy and conductivity methods work well. Si measurement in the etchant that contains an organo-silicon compound requires a new reagent development in comparison with the original reagent method developed for regular process contains inorganic Si only." @default.
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- W2518483151 date "2016-09-01" @default.
- W2518483151 modified "2023-09-27" @default.
- W2518483151 title "Metrology for High Selective Silicon Nitride Etch" @default.
- W2518483151 doi "https://doi.org/10.4028/www.scientific.net/ssp.255.81" @default.
- W2518483151 hasPublicationYear "2016" @default.
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