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• W2518694516 abstract "This paper describes the fabrication method that a lead zirconate titanate PZT thin film capacitor, which is formed on a Si substrate by metal organic decomposition MOD, can be easily transferred to flexible polymer polydimenthylsiloxane; PDMS without additional chemical contamination. The thin film capacitor is composed of sandwich structure of PZT between two metal layers. To embed the capacitor structure in the polymer substrate by dry peel-off process, three kinds of self-assembled monolayers SAMs were investigated for adhesion or antiadhesion layer between metal, polymer, and Si substrate, respectively. Also, the MOD's annealing process with SAMs for PZT lamination was investigated. As a result, the PZT capacitors of 1 µm thickness with a perovskite structure were successfully transferred and embedded in PDMS substrate. These results will be useful for fabricating MEMS devices and integration technology of electrical device to a polymer substrate such as capacitors in three-dimensional integration or for flexible electronics." @default.
• W2518694516 created "2016-09-23" @default.
• W2518694516 creator A5030337320 @default.
• W2518694516 creator A5069796340 @default.
• W2518694516 creator A5070384509 @default.
• W2518694516 creator A5084256566 @default.
• W2518694516 date "2016-09-15" @default.
• W2518694516 modified "2023-10-02" @default.
• W2518694516 title "Transfer Methods of PZT Thin Capacitor to Flexible Polymer by Self-Assembled Monolayers" @default.
• W2518694516 cites W2055477277 @default.
• W2518694516 cites W2067516600 @default.
• W2518694516 cites W2067866718 @default.
• W2518694516 cites W2177299899 @default.
• W2518694516 doi "https://doi.org/10.1002/ecj.11880" @default.
• W2518694516 hasPublicationYear "2016" @default.
• W2518694516 type Work @default.
• W2518694516 sameAs 2518694516 @default.
• W2518694516 citedByCount "2" @default.
• W2518694516 countsByYear W25186945162020 @default.
• W2518694516 countsByYear W25186945162022 @default.
• W2518694516 crossrefType "journal-article" @default.
• W2518694516 hasAuthorship W2518694516A5030337320 @default.
• W2518694516 hasAuthorship W2518694516A5069796340 @default.
• W2518694516 hasAuthorship W2518694516A5070384509 @default.
• W2518694516 hasAuthorship W2518694516A5084256566 @default.
• W2518694516 hasConcept C111368507 @default.
• W2518694516 hasConcept C119599485 @default.
• W2518694516 hasConcept C127313418 @default.
• W2518694516 hasConcept C127413603 @default.
• W2518694516 hasConcept C133386390 @default.
• W2518694516 hasConcept C136525101 @default.
• W2518694516 hasConcept C142724271 @default.
• W2518694516 hasConcept C159985019 @default.
• W2518694516 hasConcept C165801399 @default.
• W2518694516 hasConcept C171250308 @default.
• W2518694516 hasConcept C19067145 @default.
• W2518694516 hasConcept C192562407 @default.
• W2518694516 hasConcept C204787440 @default.
• W2518694516 hasConcept C2777289219 @default.
• W2518694516 hasConcept C2777557983 @default.
• W2518694516 hasConcept C2777855556 @default.
• W2518694516 hasConcept C2779227376 @default.
• W2518694516 hasConcept C2781128178 @default.
• W2518694516 hasConcept C2781155771 @default.
• W2518694516 hasConcept C49040817 @default.
• W2518694516 hasConcept C52192207 @default.
• W2518694516 hasConcept C521977710 @default.
• W2518694516 hasConcept C7070889 @default.
• W2518694516 hasConcept C71924100 @default.
• W2518694516 hasConcept C79090758 @default.
• W2518694516 hasConceptScore W2518694516C111368507 @default.
• W2518694516 hasConceptScore W2518694516C119599485 @default.
• W2518694516 hasConceptScore W2518694516C127313418 @default.
• W2518694516 hasConceptScore W2518694516C127413603 @default.
• W2518694516 hasConceptScore W2518694516C133386390 @default.
• W2518694516 hasConceptScore W2518694516C136525101 @default.
• W2518694516 hasConceptScore W2518694516C142724271 @default.
• W2518694516 hasConceptScore W2518694516C159985019 @default.
• W2518694516 hasConceptScore W2518694516C165801399 @default.
• W2518694516 hasConceptScore W2518694516C171250308 @default.
• W2518694516 hasConceptScore W2518694516C19067145 @default.
• W2518694516 hasConceptScore W2518694516C192562407 @default.
• W2518694516 hasConceptScore W2518694516C204787440 @default.
• W2518694516 hasConceptScore W2518694516C2777289219 @default.
• W2518694516 hasConceptScore W2518694516C2777557983 @default.
• W2518694516 hasConceptScore W2518694516C2777855556 @default.
• W2518694516 hasConceptScore W2518694516C2779227376 @default.
• W2518694516 hasConceptScore W2518694516C2781128178 @default.
• W2518694516 hasConceptScore W2518694516C2781155771 @default.
• W2518694516 hasConceptScore W2518694516C49040817 @default.
• W2518694516 hasConceptScore W2518694516C52192207 @default.
• W2518694516 hasConceptScore W2518694516C521977710 @default.
• W2518694516 hasConceptScore W2518694516C7070889 @default.
• W2518694516 hasConceptScore W2518694516C71924100 @default.
• W2518694516 hasConceptScore W2518694516C79090758 @default.
• W2518694516 hasLocation W25186945161 @default.
• W2518694516 hasOpenAccess W2518694516 @default.
• W2518694516 hasPrimaryLocation W25186945161 @default.
• W2518694516 hasRelatedWork W2005872665 @default.
• W2518694516 hasRelatedWork W2035835035 @default.
• W2518694516 hasRelatedWork W2036303088 @default.
• W2518694516 hasRelatedWork W2327100644 @default.
• W2518694516 hasRelatedWork W2633165254 @default.
• W2518694516 hasRelatedWork W2762878919 @default.
• W2518694516 hasRelatedWork W2781097979 @default.
• W2518694516 hasRelatedWork W2791217108 @default.
• W2518694516 hasRelatedWork W2888776708 @default.
• W2518694516 hasRelatedWork W2966539867 @default.
• W2518694516 hasRelatedWork W3107006482 @default.
• W2518694516 hasRelatedWork W3112666162 @default.
• W2518694516 hasRelatedWork W2832316284 @default.
• W2518694516 hasRelatedWork W2839685219 @default.
• W2518694516 hasRelatedWork W2850378935 @default.
• W2518694516 hasRelatedWork W2854810754 @default.
• W2518694516 hasRelatedWork W2856845644 @default.
• W2518694516 hasRelatedWork W2874257615 @default.
• W2518694516 hasRelatedWork W2982787379 @default.
• W2518694516 hasRelatedWork W3136344897 @default.
• W2518694516 isParatext "false" @default.
• W2518694516 isRetracted "false" @default.

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