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- W2518937513 abstract "We present a compact mechanical micro-scanner architecture which has low dynamic deformation. We demonstrate ±15° mechanical rotation angle via external piezoelectric actuation at 36 KHz with simulated peak-to-valley dynamic deformation of 200 nm." @default.
- W2518937513 created "2016-09-23" @default.
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- W2518937513 date "2016-07-01" @default.
- W2518937513 modified "2023-10-16" @default.
- W2518937513 title "A compact architecture for high-frequency resonant microscanners with low dynamic deformation" @default.
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- W2518937513 doi "https://doi.org/10.1109/omn.2016.7565865" @default.
- W2518937513 hasPublicationYear "2016" @default.
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