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- W2519407777 abstract "In a previous paper, it was reported that when the critical load (Lc) obtained by scratch testing in TiN-PVD and TiC-CVD films differed according to the charge, the surface residual stress (σr) measured by X-ray technique also differed. This implied that it might be possible to evaluate non-destructively differences in hard film characteristics between charges by measuring the surface residual stress by X-ray technique. This paper reports on the correlation between Lc and σr for two charges of TiN-PVD and TiC-PVD films in which the thickness was varied by varying the number of coatings. A linear relation between Lc and σr was observed in both films, and it was therefore concluded that the measurement of residual stress by X-ray technique is effective in evaluating nondestructively the differences in hard film characteristics between charges." @default.
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- W2519407777 date "1994-01-01" @default.
- W2519407777 modified "2023-09-24" @default.
- W2519407777 title "Evaluation of Characteristics of TiN and TiC Films between Charges. Effectiveness of Residual Stress Measurement by X-ray Technique." @default.
- W2519407777 doi "https://doi.org/10.4139/sfj.45.1021" @default.
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